Design and Analysis of Inverse Polarization Grating Devices for Deep Ultraviolet Light

Zhang Chong; Hu Jingpei; Zhou Ruyi; Liu Tiecheng; Sergey Avakaw; Zeng Aijun; Huang Huijie

doi:10.3788/CJL202047.0301005

Chinese Journal of Lasers, Volume. 47, Issue 3, 301005(2020)

Design and Analysis of Inverse Polarization Grating Devices for Deep Ultraviolet Light

Zhang Chong^1,2, Hu Jingpei^1,2, Zhou Ruyi^1,2, Liu Tiecheng^1,2, Sergey Avakaw³, Zeng Aijun^1,2, and Huang Huijie^1,2

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China

²College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

³Company of KBTEM-OMO Republication Unitary Scientific and Production Enterprise, Minsk 220033, Belarus

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Zhang Chong, Hu Jingpei, Zhou Ruyi, Liu Tiecheng, Sergey Avakaw, Zeng Aijun, Huang Huijie. Design and Analysis of Inverse Polarization Grating Devices for Deep Ultraviolet Light[J]. Chinese Journal of Lasers, 2020, 47(3): 301005

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Paper Information

Category: laser devices and laser physics

Received: Sep. 4, 2019

Accepted: --

Published Online: Mar. 12, 2020

The Author Email:

DOI:10.3788/CJL202047.0301005

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology