[1] C. Y. Hémonnot, S. Köster. Imaging of biological materials and cells by X-ray scattering and diffraction. ACS Nano, 11, 8542-8559(2017).

[2] C. Porter, T. Coenen, N. Geypen. Soft X-ray: novel metrology for 3D profilometry and device pitch overlay. Proc. SPIE, 12496, 124961l(2023).

[3] E. Abbe. Beiträge zur theorie des mikroskops und der mikroskopischen wahrnehmung. Arch. mikroskopische Anatomie, 9, 413-468(1873).

[4] M. Lewenstein, P. Balcou, M. Y. Ivanov. Theory of high-harmonic generation by low-frequency laser fields. Phys. Rev. A, 49, 2117-2132(1994).

[5] R. A. Bartels, A. Paul, H. Green. Generation of spatially coherent light at extreme ultraviolet wavelengths. Science, 297, 376-378(2002).

[6] K. Varju, P. Johnsson, J. Mauritsson. Physics of attosecond pulses produced via high harmonic generation. Am. J. Phys., 77, 389-395(2009).

[7] T. Popmintchev, M.-C. Chen, D. Popmintchev. Bright coherent ultrahigh harmonics in the keV X-ray regime from mid-infrared femtosecond lasers. Science, 336, 1287-1291(2012).

[8] I. Pupeza, C. Zhang, M. Högner. Extreme-ultraviolet frequency combs for precision metrology and attosecond science. Nat. Photonics, 15, 175-186(2021).

[9] R. Klas, A. Kirsche, M. Gebhardt. Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source. PhotoniX, 2, 4(2021).

[10] J. M. Rodenburg, H. M. L. Faulkner. A phase retrieval algorithm for shifting illumination. Appl. Phys. Lett., 85, 4795-4797(2004).

[11] J. Rodenburg, A. Hurst, A. Cullis. Transmission microscopy without lenses for objects of unlimited size. Ultramicroscopy, 107, 227-231(2007).

[12] M. D. Seaberg, B. Zhang, D. F. Gardner. Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography. Optica, 1, 39-44(2014).

[13] L. Loetgering, X. Liu, A. C. C. De Beurs. Tailoring spatial entropy in extreme ultraviolet focused beams for multispectral ptychography. Optica, 8, 130-138(2021).

[14] P. D. Baksh, M. Odstrčil, H.-S. Kim. Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source. Opt. Lett., 41, 1317-1320(2016).

[15] W. Eschen, L. Loetgering, V. Schuster. Material-specific high-resolution table-top extreme ultraviolet microscopy. Light Sci. Appl., 11, 117(2022).

[16] M. Tanksalvala, C. L. Porter, Y. Esashi. Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry. Sci. Adv., 7, eabd9667(2021).

[17] W. Eschen, C. Liu, D. S. Penagos Molina. High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a SCMOS detector. Opt. Express, 31, 14212-14224(2023).

[18] G. K. Tadesse, W. Eschen, R. Klas. Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source. Sci. Rep., 9, 1735(2019).

[19] H. Lu, M. Odstrčil, C. Pooley. Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography. Ultramicroscopy, 249, 113720(2023).

[20] M. Du, X. Liu, A. Pelekanidis. High-resolution wavefront sensing and aberration analysis of multi-spectral extreme ultraviolet beams. Optica, 10, 255-263(2023).

[21] X. Liu, A. Pelekanidis, M. Du. Observation of chromatic effects in high-order harmonic generation. Phys. Rev. Res., 5, 043100(2023).

[22] Y. Shao, S. Weerdenburg, J. Seifert. Wavelength-multiplexed multi-mode EUV reflection ptychography based on automatic differentiation. Light Sci. Appl., 13, 196(2024).

[23] P. Thibault, M. Dierolf, A. Menzel. High-resolution scanning X-ray diffraction microscopy. Science, 321, 379-382(2008).

[24] L. Loetgering, M. Baluktsian, K. Keskinbora. Generation and characterization of focused helical X-ray beams. Sci. Adv., 6, eaax8836(2020).

[25] J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos. Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging. Opt. Express, 19, 21333-21344(2011).

[26] Y. Yao, Y. Jiang, J. Klug. Broadband x-ray ptychography using multi-wavelength algorithm. J. Synchrotron. Radiat., 28, 309-317(2021).

[27] B. L. Henke, E. M. Gullikson, J. C. Davis. X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50–30,000 eV, Z = 1–92. At. Data Nucl. Data Tables, 54, 181-342(1993).

[28] S. Witte, V. T. Tenner, D. W. Noom. Lensless diffractive imaging with ultra-broadband table-top sources: from infrared to extreme-ultraviolet wavelengths. Light Sci. Appl., 3, e163(2014).

[29] G. S. M. Jansen, A. d. Beurs, X. Liu. Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging. Opt. Express, 26, 12479-12489(2018).

[30] D. J. Batey, D. Claus, J. M. Rodenburg. Information multiplexing in ptychography. Ultramicroscopy, 138, 13-21(2014).

[31] A. Rana, J. Zhang, M. Pham. Potential of attosecond coherent diffractive imaging. Phys. Rev. Lett., 125, 086101(2020).

[32] J. Huijts, S. Fernandez, D. Gauthier. Broadband coherent diffractive imaging. Nat. Photonics, 14, 618-622(2020).

[33] P. Thibault, A. Menzel. Reconstructing state mixtures from diffraction measurements. Nature, 494, 68-71(2013).

[34] A. M. Maiden, J. M. Rodenburg, M. J. Humphry. Optical ptychography: a practical implementation with useful resolution. Opt. Lett., 35, 2585-2587(2010).

[35] A. M. Maiden, M. J. Humphry, F. Zhang. Superresolution imaging via ptychography. J. Opt. Soc. Am. A, 28, 604-612(2011).

[36] M. Guizar-Sicairos, M. Holler, A. Diaz. Role of the illumination spatial-frequency spectrum for ptychography. Phys. Rev. B, 86, 100103(2012).

[37] A. Maiden, G. Morrison, B. Kaulich. Soft X-ray spectromicroscopy using ptychography with randomly phased illumination. Nat. Commun., 4, 1669(2013).

[38] M. Odstrčil, M. Lebugle, M. Guizar-Sicairos. Towards optimized illumination for high-resolution ptychography. Opt. Express, 27, 14981-14997(2019).

[39] X. Ji, X. He, Z. Jiang. Resolution enhancement with highly curved illumination in ptychography. Appl. Opt., 61, 10150-10158(2022).

[40] M. Pancaldi, F. Guzzi, C. S. Bevis. High-resolution ptychographic imaging at a seeded free-electron laser source using OAM beams. Optica, 11, 403-411(2024).

[41] W. Eschen, C. Liu, M. Steinert. Structured illumination ptychography and at-wavelength characterization with an EUV diffuser at 13.5 nm wavelength. Opt. Express, 32, 3480-3491(2024).

[42] C. Guo, A. Harth, S. Carlström. Phase control of attosecond pulses in a train. J. Phys. B, 51, 034006(2018).

[43] R. Géneaux, A. Camper, T. Auguste. Synthesis and characterization of attosecond light vortices in the extreme ultraviolet. Nat. Commun., 7, 12583(2016).

[44] C. Hernández-Garca, A. Picón, J. San Román. Attosecond extreme ultraviolet vortices from high-order harmonic generation. Phys. Rev. Lett., 111, 083602(2013).

[45] M. Zürch, C. Kern, P. Hansinger. Strong-field physics with singular light beams. Nat. Phys., 8, 743-746(2012).

[46] W. Paufler, B. Böning, S. Fritzsche. High harmonic generation with Laguerre–Gaussian beams. J. Opt., 21, 094001(2019).

[47] G. Gariepy, J. Leach, K. T. Kim. Creating high-harmonic beams with controlled orbital angular momentum. Phys. Rev. Lett., 113, 153901(2014).

[48] L. Rego, K. M. Dorney, N. J. Brooks. Generation of extreme-ultraviolet beams with time-varying orbital angular momentum. Science, 364, eaaw9486(2019).

[49] K. M. Dorney, L. Rego, N. J. Brooks. Controlling the polarization and vortex charge of attosecond high-harmonic beams via simultaneous spin–orbit momentum conservation. Nat. Photonics, 13, 123-130(2019).

[50] F. Sanson, A. K. Pandey, F. Harms. Hartmann wavefront sensor characterization of a high charge vortex beam in the extreme ultraviolet spectral range. Opt. Lett., 43, 2780-2783(2018).

[51] F. Sanson, A. K. Pandey, I. Papagiannouli. Highly multimodal structure of high topological charge extreme ultraviolet vortex beams. Opt. Lett., 45, 4790-4793(2020).

[52] L. Rego, J. S. Román, A. Picón. Nonperturbative twist in the generation of extreme-ultraviolet vortex beams. Phys. Rev. Lett., 117, 163202(2016).

[53] A. K. Pandey, A. de las Heras, T. Larrieu. Characterization of extreme ultraviolet vortex beams with a very high topological charge. ACS Photonics, 9, 944-951(2022).

[54] B. Wang, N. J. Brooks, P. Johnsen. High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams. Optica, 10, 1245-1252(2023).

[55] Y. Iwasaki, A. G. Kusne, I. Takeuchi. Comparison of dissimilarity measures for cluster analysis of X-ray diffraction data from combinatorial libraries. npj Comput. Mater., 3, 4(2017).

[56] L. Freisem, G. S. M. Jansen, D. Rudolf. Spectrally resolved single-shot wavefront sensing of broadband high-harmonic sources. Opt. Express, 26, 6860-6871(2018).

[57] M. Van Heel, M. Schatz. Fourier shell correlation threshold criteria. J. Struct. Biol., 151, 250-262(2005).

[58] L. Loetgering, M. Du, D. B. Flaes. PtyLab.m/py/jl: a cross-platform, open-source inverse modeling toolbox for conventional and Fourier ptychography. Opt. Express, 31, 13763-13797(2023).

[59] https://www.vortex-photonics.de/. https://www.vortex-photonics.de/

[60] A. M. Maiden, J. M. Rodenburg. An improved ptychographical phase retrieval algorithm for diffractive imaging. Ultramicroscopy, 109, 1256-1262(2009).

[61] O. Bunk, M. Dierolf, S. Kynde. Influence of the overlap parameter on the convergence of the ptychographical iterative engine. Ultramicroscopy, 108, 481-487(2008).

[62] S. M. Kay. Fundamentals of Statistical Signal Processing: Estimation Theory(1993).

[63] D. Bouchet, S. Rotter, A. P. Mosk. Maximum information states for coherent scattering measurements. Nat. Phys., 17, 564-568(2021).

[64] D. Bouchet, J. Seifert, A. P. Mosk. Optimizing illumination for precise multi-parameter estimations in coherent diffractive imaging. Opt. Lett., 46, 254-257(2021).

[65] L. Loetgering, M. Du, K. S. E. Eikema. zPIE: an autofocusing algorithm for ptychography. Opt. Lett., 45, 2030-2033(2020).

[66] D. Bouchet, J. Dong, D. Maestre. Fundamental bounds on the precision of classical phase microscopes. Phys. Rev. Appl., 15, 024047(2021).

[67] F. Zhang, A. Pelekanidis, M. Du. Nonlinear compression of mj-level pulses via double-pass loose focusing in air. European Conference on Lasers and Electro-Optics, cf_p_15(2023).

[68] D. Paganin. Coherent X-ray Optics, 6(2006).

[69] http://www.optixfab.com/. http://www.optixfab.com/

[70] D. Malacara-Hernández, A. Gomez-Vieyra. Optical design of systems with off-axis spherical mirrors. Proc. SPIE, 8011, 801114(2011).

[71] J. D. Schmidt. Numerical Simulation of Optical Wave Propagation with Examples in MATLAB(2010).

[72] J. W. Goodman. Introduction to Fourier Optics(2005).

[73] P. Li. Investigations and improvements in ptychographic imaging(2016).

[74] A. Maiden, D. Johnson, P. Li. Further improvements to the ptychographical iterative engine. Optica, 4, 736-745(2017).

[75] D. F. Gardner, M. Tanksalvala, E. R. Shanblatt. Subwavelength coherent imaging of periodic samples using a 13.5 nm tabletop high-harmonic light source. Nat. Photonics, 11, 259-263(2017).