The key techniques of the research on magnetic fluid traveling wave pumps are the produc-tion of traveling wave magnetic fields,the design of pump structures,the dynamic characteristics of magnetic fluid, and so on.According to th

Two kinds of micro Direct Methanol Fuel Cells(μ-DMFC)characterized by simple configurations,small sizes and high specific power densities are presented by using silicon and stainless steel as poles in this paper.The working princi

The motion of a target in air will produce electrostatic fields which can be detected by a fuze to provide some useful information of the target. Moreover, MEMS devives have shown their characteristics of small sizes, low power co

A comparative study of the Sigma Delta Modulation(SDM)and the Pulse Code Modulation(PCM) is presented, and the advantages and the disadvantages of the two kinds of modulation are also obtained. A 2-bit SDM simulated system and a 2

A novel MEMS microwave power coupler based on GaAs for Ku-band(12.4～18 Ghz) is presented to improve the existing technology for measuring microwave power based on the termination devices, such as thermistors, thermocouples, and di

The electroosmotic flow drives a fluid passing through microchannels by an applied electric field,which also induces heat transfers both in the fluid and channel walls because of a Joule-heating. Using the Computing Flow Dynamics(

In order to filtrate the microwave signals in micro electronic mechanical systems,a micro Composite Right/Left Handed(CRLH) transmission line band reject filter is presented,and the design theory,structure characteristics and fabr

The spectra of input electric impedance for a four-layer (electrode/piezoelectric film/electrode/substrate) thin Film Bulk Acoustic Resonator (FBAR) with the materials of Al/AlN/Al/Si and the thickness of each layer of 0.8 μm/1.9

The low-g inertial switch is a kind of inertial device sensitive to the linear acceleration and achieves the switch closure when subjects to the applied acceleration。Due to its micro size,the switch is designed as a structure with

A hybrid vibration-powered microgenerator has been presented by combining the structures of piezoelectric generator and electrostatic generator,and the structure of the microgenerator is optimized by a Finite Element Method(FEM) t

The manufacture of thick micro-precision sieve-sheets with high open areas is a key technical challenge. After analysis on the process limitations existing in three manufacturing methods for metal micro-precision sieves,an optimiz

The noises of a special gas IR detector fabricated by MEMS mainly include the temperature-fluctuation noise,mechanical-thermal noise and the background noise. Based on thermal conduction theory,a thermal model is built up to get t

A design and fabrication method for a silicon micromachined resonant accelerometer based on a zinc oxide (ZnO) nanowire is reported. The key and sensitive element of the accelerometer is a nanowire-based resonator with a single Zn

A handwriting detecting system based on micro-accelerometers and micro-gyros is proposed,and the algorithm of the detecting system is also described in detail. The micro-accelerometers and micro-gyros mounted on the pen are used i

The electrical deposition in an over-plating technology was explored under different line spaces and line widths and the effect of geometries,such as a line space/line width ratio,and the deposition velocity during the over-platin

Surface Acoustic Wave(SAW) actuators have been dramatically required for a micro actuator not only due to their direct driving objects,low energy losses and drive errors,but also their higher work frequencies,shorter SAW waves,sma

This paper reports dielectrophoretic traps and a micro-motor for driving and sorting latex spheres on a chip with complex structures. A scheme containing function modules for pre-separating,sorting and driving micro-particles in a

An 18 V switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer is designed. The circuit consists of a switched-capacitor charge sense amplifier,a PID control circuit and a correlated

The Ionic Conducting Polymer gel Film(ICPF) can be driven by a low voltage (about 1.5 V) and has advantages in the less mass and fast response. A micro-robot moved at 3 mm/s velocity in the water can be actuated by the ICPF (21.6

To reduce the hysteresis of spin valve films is important for fabricating Giant Magnetoresistance(GMR) sensors. This paper reports the experiment results of reducing hysteresis of the spin valve films by using an annealing method

A novel power generator in the tire which is applied in a wireless Tire Pressure Monitor System(TPMS) was designed. The piezoelectric convertor constructed by bender arrays was merged to the inner surface of a tire to transform th

A Tapered Slot Antenna (TSA) fed by a Coplanar Waveguide(CPW) on a high dielectric constant substrate (εr=11.9) worked at 35 GHz is presented. The performance of the TSA is sensitive to the effective thickness and electric constan

A novel electronics cooling system—ion drag Electrohydrodynamic (EHD) micropump was introduced. The ion drag EHD micropump containing a planar electrode array on a silicon substrate was fabricated and tested,in which the electrode

To reduce the frequency split of the drive mode and the sense mode of a vibrating ring gyroscope to improve the performance of the gyroscope,a novel symmetrical structure with electromagnetic driving and detection is proposed in t

The integrated pressure,temperature,and relative humidity sensors with high precision are highly needed in environmental monitoring and industrial control,for they have the superiorities on small sizes,low weights,low costs and ea

A new dual-mass gyro is studied in this paper,for double-linear vibrational dual-mass MEMS gyroscopes are insensitive to the environment,and their differential outputs can effectively suppress the common mode interference. On the

The inertia sensitive component of a force-balanced vacuum microelectronic accelerometer is effected by both the elastic force and the electrostatic force,and its total stiffness is the sum of the mechanical stiffness of the beams

The design,modeling and simulation of a novel MEMS hybrid energy generator for multi-frequency vibration is presented to meet the requirements of portable and wireless electronic devices for collecting energy from the ambient envi

In order to use a micro ultrasonic bonding method to package polymer microfluidic chips,an auxiliary microstructure named micro energy director is designed and fabricated on two sides of the microchannel by a selective bonding met

A low-noise closed-loop interface circuit based on a switched-capacitor is presented to improve the noise performance of a MEMS capacitive accelerometer. A charge integrator is adopted as pre-amplifier,which is insensitive to para

A capacitive pressure sensor with a new movable electric plate structure is presented to improve the output nonlinearity of a MEMS-based capacitive pressure sensor. The movable plate of the sensor is a rectangular memrance made of

The heat transfer model of a micro Direct Methanol Fuel Cell (μDMFC) based on heat transfer mechanisms is presented. Three kinds of patterns of the heater integrated into a μDMFC are designed and simulated using the Finite Element

A novel configuration of variable-focus liquid lens based on an electrowetting-on-dielectric technique is presented,which consists of a glass slide coated with a conductive Indium Tin Oxide (ITO) film,a hydrophobic dielectric film

This article proposes a theoretical model of molecular sieving through repeated nanofilter arrays consisting of alternative deep and shallow regions. The role of configurational entropy,which arises from the inaccessibility of som

Thermal effect on the equivalent spring constants of double-clamped beams (bridges) with two kinds of mass arrangements including central mass and side mass were studied by theoretical analysis and finite element simulation. An eq

A bulk micromachined vibratory tunneling gyroscope which employs the high displacement sensitivity of quantum tunneling to obtain the desired resolution has been developed. The device consists of fan-shaped comb drivers which can

A fast tool servo mechanism with a piezoelectric actuator has attracted more attention for its excellent machining way and high resolution.In this paper, the classical Preisach hysteresis modeling for a Fast Tool Servo (FTS) syste

The design and control of a Dual-stage Feed Drive (DSFD) system on a ultra-precision machine is presented. The DSFD system combining coarse (large stroke) and fine (fine resolution) drive stages in series is designed to provide th

According to the principle that light polarization can be expressed with a Stokes vector, a new system to measure the polarized skylight distribution is developed. The system is composed of a computer,a modified equatorial mount,a

The piezoelectric vibration-based power generator is a promising MEMS electricity source to power wireless sensing nodes for the fault diagnosis of rotary machines. In this paper,a piezoelectric vibration-based power generator is

The change in resistivity caused by the mechanical deformation in a micro-accelerometer was used to design an accelerator to measure physical quantities such as high g acceleration. The process and a solid model were constructed i

A new meshing method is introduced to obtain a hexahedral mesh for three dimension MEMS models. MEMS models are built from 2 dimensional masks according to a process sequence. In most of cases, it leads to layered geometries, whos

In order to measure temperature in high-precision, a high-performance and fully digital smart temperature sensor is designed, which comprises a quartz tuning fork resonator,an interface with Complementary Metal Oxide Semiconductor

In order to solve the pressure measurement problem in harsh environments, such as high temperature above 200 ℃, a special piezoresistive pressure sensor with the ranges of 0～120 kPa is developed based on the Micro Electro-mechanic

Optical tweezers have been successfully used in various scientific and engineering fields such as optics and microactuators. However, there is still a lack of a sophisticated model for optical tweezers on driving complex microroto

The characterization of a triaxial piezoresistive high-g accelerometer by a Hopkinson bar and a data processing method are discussed. After fixing the accelerometer on the end of a calibration bar, the projectile launched from a b

To improve the existing method to detect the product oil in pipeline sequence transportation, it is necessary to set a new method for product oil identification and detection based on the characteristics that reflect the quality o

The tracking method based on a people model contributes to realizing the kinetic people tracking for a given video,and it can learn the people model by using much less frames of the video. This paper proposes a learn algorithm for