Optics and Precision Engineering, Volume. 17, Issue 6, 1262(2009)
MEMS hybrid power-generator from vibration energy
A hybrid vibration-powered microgenerator has been presented by combining the structures of piezoelectric generator and electrostatic generator,and the structure of the microgenerator is optimized by a Finite Element Method(FEM) to obtain the desired low resonant frequency. Then,an analytic model is established to predict the behavior of the hybrid power-generator and a MATLAB/SIMULINK is utilized for the numerical simulation. The simulated results reveal that the hybrid power-generator has a higher output power than those of two energy harvesting mechanisms at a special resonant frequency. For a resonant frequency of 282 Hz,the simulation result shows the output power from the hybrid mechanism is 4.85 μm,which doubles 2.11 μW from the original capacitive mechanism.
Get Citation
Copy Citation Text
ZHANG Yang-jian, SAN Hai-sheng. MEMS hybrid power-generator from vibration energy[J]. Optics and Precision Engineering, 2009, 17(6): 1262