Optics and Precision Engineering, Volume. 17, Issue 6, 1262(2009)

MEMS hybrid power-generator from vibration energy

ZHANG Yang-jian* and SAN Hai-sheng
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  • [in Chinese]
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    A hybrid vibration-powered microgenerator has been presented by combining the structures of piezoelectric generator and electrostatic generator,and the structure of the microgenerator is optimized by a Finite Element Method(FEM) to obtain the desired low resonant frequency. Then,an analytic model is established to predict the behavior of the hybrid power-generator and a MATLAB/SIMULINK is utilized for the numerical simulation. The simulated results reveal that the hybrid power-generator has a higher output power than those of two energy harvesting mechanisms at a special resonant frequency. For a resonant frequency of 282 Hz,the simulation result shows the output power from the hybrid mechanism is 4.85 μm,which doubles 2.11 μW from the original capacitive mechanism.

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    ZHANG Yang-jian, SAN Hai-sheng. MEMS hybrid power-generator from vibration energy[J]. Optics and Precision Engineering, 2009, 17(6): 1262

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    Paper Information

    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Aug. 28, 2009

    The Author Email: Yang-jian ZHANG (zyj710077@gmail.com)

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