Optics and Precision Engineering, Volume. 17, Issue 6, 1350(2009)
Driving-mode test of dual-mass MEMS gyroscope
A new dual-mass gyro is studied in this paper,for double-linear vibrational dual-mass MEMS gyroscopes are insensitive to the environment,and their differential outputs can effectively suppress the common mode interference. On the basis of the structure and the principle of operation,the driving modal of the dual-mass gyro is analyzed in theory,and the simplified dynamic equations are proposed. Then,the finite element software ANSYS is used to numerically simulate the driving modal,and a driving circuit is used to test the driving modal of a fabricated gyro sample. By using several loading methods in simulations and tests,the amplitude-frequency curves are obtained. These results are in agreement with the theory analysis,which shows that dual-side driving method is better than single-side driving one,and the opposite-direction driving method can drive a dual-mass gyro in working mode. Simulation and experiment results verify the driving-mode characteristics of this dual-mass micro-gyro.
Get Citation
Copy Citation Text
YIN Yong, WANG Shou-rong, WANG Cun-chao, YANG Bo, SHENG Ping, TIAN Zhong. Driving-mode test of dual-mass MEMS gyroscope[J]. Optics and Precision Engineering, 2009, 17(6): 1350