Optics and Precision Engineering, Volume. 17, Issue 6, 1350(2009)

Driving-mode test of dual-mass MEMS gyroscope

YIN Yong1,*... WANG Shou-rong1, WANG Cun-chao1, YANG Bo1, SHENG Ping1 and TIAN Zhong2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    A new dual-mass gyro is studied in this paper,for double-linear vibrational dual-mass MEMS gyroscopes are insensitive to the environment,and their differential outputs can effectively suppress the common mode interference. On the basis of the structure and the principle of operation,the driving modal of the dual-mass gyro is analyzed in theory,and the simplified dynamic equations are proposed. Then,the finite element software ANSYS is used to numerically simulate the driving modal,and a driving circuit is used to test the driving modal of a fabricated gyro sample. By using several loading methods in simulations and tests,the amplitude-frequency curves are obtained. These results are in agreement with the theory analysis,which shows that dual-side driving method is better than single-side driving one,and the opposite-direction driving method can drive a dual-mass gyro in working mode. Simulation and experiment results verify the driving-mode characteristics of this dual-mass micro-gyro.

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    YIN Yong, WANG Shou-rong, WANG Cun-chao, YANG Bo, SHENG Ping, TIAN Zhong. Driving-mode test of dual-mass MEMS gyroscope[J]. Optics and Precision Engineering, 2009, 17(6): 1350

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    Paper Information

    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Aug. 28, 2009

    The Author Email: Yong YIN (yinyong_seu@163.com)

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