NUCLEAR TECHNIQUES, Volume. 46, Issue 10, 100202(2023)
Effect of substrate temperature on surface morphology and mechanical properties of Ti films
Figures & Tables(7)
Fig. 1. XRD patterns (a) and texture coefficients (b) of Ti films at different substrate temperatures
Fig. 2. SEM images of Ti films at different substrate temperatures (a) 600 ℃, (b) 650 ℃, (c) 700 ℃, (d) 750 ℃
Fig. 3. AFM images of Ti films at different substrate temperatures (a) 600 ℃, (b) 650 ℃, (c) 700 ℃, (d) 750 ℃
Fig. 4. Grain size distribution of Ti films at different substrate temperatures (a) 600 ℃, (b) 650 ℃, (c) 700 ℃, (d) 750 ℃
Fig. 5. Average grain size and roughness of Ti films at different substrate temperatures
Fig. 6. Representative unloading curves of the AFM nanoindentation of Ti films at different substrate temperatures
Table 1. Calculation results for elastic modulus of Ti films at different substrate temperatures
View tableView in ArticleTable 1. Calculation results for elastic modulus of Ti films at different substrate temperatures
基体温度
Substrate temperature / ℃
针尖曲率半径R
Tip radius / nm
泊松比ν
Poisson's ratio
平均约化弹性模量Er
Average Er / GPa
平均弹性模量E
Average E / GPa
600 40 0.32 102.7±15.4 92.2±13.8 650 40 0.32 127.0±12.6 114.0±11.3 700 40 0.32 146.9±17.3 131.8±15.6 750 40 0.32 195.7±16.1 175.7±14.5
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Xing WANG, Mingwang MA, Ruiyun WAN, Lei WANG, Xiaohua TAN. Effect of substrate temperature on surface morphology and mechanical properties of Ti films[J]. NUCLEAR TECHNIQUES, 2023, 46(10): 100202
Paper Information
Category: Research Articles
Received: Apr. 10, 2023
Accepted: --
Published Online: Nov. 21, 2023
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