Chinese Optics, Volume. 18, Issue 1, 170(2025)
Modeling and sliding mode control based on inverse compensation of piezo-positioning system
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Zhi-bin LI, Yuan-ze XIN, Jian-qiang ZHANG, Chong-shang SUN. Modeling and sliding mode control based on inverse compensation of piezo-positioning system[J]. Chinese Optics, 2025, 18(1): 170
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Received: Apr. 8, 2024
Accepted: May. 15, 2024
Published Online: Mar. 14, 2025
The Author Email: Jian-qiang ZHANG (zhangjq7170@163.com)