Fig. 1. Hysteresis characteristic curves

Fig. 2. Play operator

Fig. 3. Hammerstein model structure

Fig. 4. Experimental platform of piezo-positioning system

Fig. 5. Modeling and measured hysteresis curves

Fig. 6. Input and output data of piezo-positioning system

Fig. 7. Singular value distribution

Fig. 8. Comparison diagrams of frequency response

Fig. 9. Block diagram of P-I inverse model feedforward control

Fig. 10. Model performance adjustment effect

Fig. 11. Block diagram of sliding mode control of piezo-positioning system with inverse compensation

Fig. 12. Structural block diagram of piezo-positioning actuator control system

Fig. 13. Control effect fitting diagram

Fig. 14. System step response curve

Fig. 15. Closed-loop frequency characteristic curve

Fig. 16. Disturbance rejection magnitude-frequency characteristic curves for three control schemes