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Chinese Journal of Lasers, Volume. 50, Issue 22, 2219001(2023)

Compact High Uniformity Silicon Waveguide Arrayed Waveguide Grating

Zhihua Feng1,4, Shuo Yuan2, Yishu Chen2, Haipeng Liu2, Qunyu Bi3, Fuling Zhang4、*, and Jijun Feng2、**
Author Affiliations
  • 1School of Physics, Xidian University, Xi an 710071, Shaanxi, China
  • 2Shanghai Key Laboratory of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 3Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Soochow University, Suzhou 215006, Jiangsu, China
  • 4The 27th Research Institute, China Electronics Technology Group Corporation, Zhengzhou 450047, Henan, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (8)
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    References (34)
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    Figures & Tables(8)
    Schematics of arrayed waveguide grating and star coupler. (a) Structure of arrayed waveguide grating; (b) structure of star coupler

    Fig. 1. Schematics of arrayed waveguide grating and star coupler. (a) Structure of arrayed waveguide grating; (b) structure of star coupler

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    Waveguide platform and TE fundamental mode. (a) SOI platform; (b) TE fundamental mode field distribution

    Fig. 2. Waveguide platform and TE fundamental mode. (a) SOI platform; (b) TE fundamental mode field distribution

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    Bending loss and effective index versus bending radius

    Fig. 3. Bending loss and effective index versus bending radius

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    Schematic of manufacturing process of silicon waveguide arrayed waveguide gratings

    Fig. 4. Schematic of manufacturing process of silicon waveguide arrayed waveguide gratings

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    Optical microscope image of arrayed waveguide grating

    Fig. 5. Optical microscope image of arrayed waveguide grating

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    Schematic of test system

    Fig. 6. Schematic of test system

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    Output spectra of 8-channel 200 GHz silicon waveguide arrayed waveguide grating measured by experiment

    Fig. 7. Output spectra of 8-channel 200 GHz silicon waveguide arrayed waveguide grating measured by experiment

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    • Table 1. Main parameters of compact high uniformity silicon waveguide arrayed waveguide grating

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      Table 1. Main parameters of compact high uniformity silicon waveguide arrayed waveguide grating

      ParameterValue
      Number of channels8
      Center wavelength /nm1577.5
      Channel spacing /nm1.6
      Free spectral range /nm29.44
      Number of arrayed waveguides43
      Minimum bending radius /μm15
      Single mode waveguide width /nm500
      Diffraction order21
      Length increment /μm14.05
      Pitch of adjacent arrayed waveguides /μm1.2
      Length of star coupler /μm86
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    Zhihua Feng, Shuo Yuan, Yishu Chen, Haipeng Liu, Qunyu Bi, Fuling Zhang, Jijun Feng. Compact High Uniformity Silicon Waveguide Arrayed Waveguide Grating[J]. Chinese Journal of Lasers, 2023, 50(22): 2219001

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    Paper Information

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    Received: Feb. 2, 2023

    Accepted: Mar. 15, 2023

    Published Online: Nov. 7, 2023

    The Author Email: Zhang Fuling (lidarzhang666@163.com), Feng Jijun (fjijun@usst.edu.cn)

    DOI:10.3788/CJL230484

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology