Compact High Uniformity Silicon Waveguide Arrayed Waveguide Grating

Zhihua Feng; Shuo Yuan; Yishu Chen; Haipeng Liu; Qunyu Bi; Fuling Zhang; Jijun Feng

doi:10.3788/CJL230484

Chinese Journal of Lasers, Volume. 50, Issue 22, 2219001(2023)

Compact High Uniformity Silicon Waveguide Arrayed Waveguide Grating

Zhihua Feng^1,4, Shuo Yuan², Yishu Chen², Haipeng Liu², Qunyu Bi³, Fuling Zhang^4、*, and Jijun Feng^2、**

Author Affiliations

¹School of Physics, Xidian University, Xi an 710071, Shaanxi, China

²Shanghai Key Laboratory of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China

³Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Soochow University, Suzhou 215006, Jiangsu, China

⁴The 27th Research Institute, China Electronics Technology Group Corporation, Zhengzhou 450047, Henan, China

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Zhihua Feng, Shuo Yuan, Yishu Chen, Haipeng Liu, Qunyu Bi, Fuling Zhang, Jijun Feng. Compact High Uniformity Silicon Waveguide Arrayed Waveguide Grating[J]. Chinese Journal of Lasers, 2023, 50(22): 2219001

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Paper Information

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Received: Feb. 2, 2023

Accepted: Mar. 15, 2023

Published Online: Nov. 7, 2023

The Author Email: Zhang Fuling (lidarzhang666@163.com), Feng Jijun (fjijun@usst.edu.cn)

DOI:10.3788/CJL230484

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology