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Photonics Research, Volume. 11, Issue 4, 558(2023)

Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits Spotlight on Optics

Zhichao Ye1, Haiyan Jia1, Zhangjun Huang1, Chen Shen2,3, Jinbao Long2,3, Baoqi Shi2,4, Yi-Han Luo2,3, Lan Gao2,3, Wei Sun2, Hairun Guo5, Jijun He6, and Junqiu Liu2,7、*
Author Affiliations
  • 1Qaleido Photonics, Hangzhou 310000, China
  • 2International Quantum Academy, Shenzhen 518048, China
  • 3Shenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
  • 4Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China
  • 5Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China
  • 6Key Laboratory of Radar Imaging and Microwave Photonics, Ministry of Education, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
  • 7Hefei National Laboratory, University of Science and Technology of China, Hefei 230088, China
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    Zhichao Ye, Haiyan Jia, Zhangjun Huang, Chen Shen, Jinbao Long, Baoqi Shi, Yi-Han Luo, Lan Gao, Wei Sun, Hairun Guo, Jijun He, Junqiu Liu, "Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits," Photonics Res. 11, 558 (2023)

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    Paper Information

    Category: Integrated Optics

    Received: Jan. 24, 2023

    Accepted: Feb. 12, 2023

    Published Online: Mar. 9, 2023

    The Author Email: Junqiu Liu (liujq@iqasz.cn)

    DOI:10.1364/PRJ.486379

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology