Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits

Zhichao Ye; Haiyan Jia; Zhangjun Huang; Chen Shen; Jinbao Long; Baoqi Shi; Yi-Han Luo; Lan Gao; Wei Sun; Hairun Guo; Jijun He; Junqiu Liu

doi:10.1364/PRJ.486379

Photonics Research, Volume. 11, Issue 4, 558(2023)

Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits Spotlight on Optics

Zhichao Ye¹, Haiyan Jia¹, Zhangjun Huang¹, Chen Shen^2,3, Jinbao Long^2,3, Baoqi Shi^2,4, Yi-Han Luo^2,3, Lan Gao^2,3, Wei Sun², Hairun Guo⁵, Jijun He⁶, and Junqiu Liu^2,7、*

Author Affiliations

¹Qaleido Photonics, Hangzhou 310000, China

²International Quantum Academy, Shenzhen 518048, China

³Shenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China

⁴Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China

⁵Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China

⁶Key Laboratory of Radar Imaging and Microwave Photonics, Ministry of Education, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China

⁷Hefei National Laboratory, University of Science and Technology of China, Hefei 230088, China

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Zhichao Ye, Haiyan Jia, Zhangjun Huang, Chen Shen, Jinbao Long, Baoqi Shi, Yi-Han Luo, Lan Gao, Wei Sun, Hairun Guo, Jijun He, Junqiu Liu, "Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits," Photonics Res. 11, 558 (2023)

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Paper Information

Category: Integrated Optics

Received: Jan. 24, 2023

Accepted: Feb. 12, 2023

Published Online: Mar. 9, 2023

The Author Email: Junqiu Liu (liujq@iqasz.cn)

DOI:10.1364/PRJ.486379

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology