Laser & Optoelectronics Progress, Volume. 56, Issue 23, 231202(2019)

Analysis and Verification of Position Error of Reticle Stage Based on Planar Grating

Chunxiao Hao1,*... Wentao Zhang1,2, Xianying Wang2 and Xunzhi Huang2 |Show fewer author(s)
Author Affiliations
  • 1School of Electronic Engineering and Automation, Guilin University of Electronic Technology, Guilin, Guangxi 541004, China
  • 2Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China
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    Chunxiao Hao, Wentao Zhang, Xianying Wang, Xunzhi Huang. Analysis and Verification of Position Error of Reticle Stage Based on Planar Grating[J]. Laser & Optoelectronics Progress, 2019, 56(23): 231202

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 26, 2019

    Accepted: Jun. 24, 2019

    Published Online: Nov. 27, 2019

    The Author Email: Hao Chunxiao (glietzwt@163.com)

    DOI:10.3788/LOP56.231202

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