[1] Zhou L, Dai Y F, Xie X H et al. A novel path used in computer-controlled polishing process based on uniform-area-increment spiral[J]. Journal of National University of Defense Technology, 31, 1-4(2009).

[2] Li S Y, Dai Y F, Xie X H et al[M]. New technology for manufacturing and measurement of large and middle-scale aspheric surfaces, 92-93(2011).

[3] Jiao C J, Li S Y, Wang D F et al. Material removal property in ion figuring process for optical components[J]. Optics and Precision Engineering, 15, 1520-1526(2007).

[4] Zhou L. Study on theory and technology in ion beam figuring for optical surfaces[D]. Changsha: National University of Defense Technology, 34-35(2008).

[5] Jiao C J. Study on the material removal mechanisms and fundamental processes for ion beam figuring optical mirrors[D]. Changsha: National University of Defense Technology, 20-23(2008).

[6] Liao W L. Deterministic ion beam figuring technology for high-precision spherical components[D]. Changsha: National University of Defense Technology, 26-28(2010).

[7] Allen L N. Progress in ion figuring large optics[J]. Proceedings of SPIE, 2428, 237-247(1994).

[8] Michel F, Schindler A, Thomas H. Ion beam figuring of SiC mirrors provides ultimate WFE performances for any type of telescope[J]. Proceedings of SPIE, 3739, 142-154(1999).

[9] Schindler A, Haensel T, Zeuner M et al. Ion beam figuring and ion beam polishing production tools-processing technology included-for customized solutions. [C]∥Optical Fabrication and Testing, June 18, 2000, Québec City, Canada. Washington, D.C.: OSA, OWA6(2000).

[10] Dai Y F, Zhou L, Xie X H et al. Deterministic figuring in optical machining by ion beam[J]. Acta Optica Sinica, 28, 1131-1135(2008).

[11] Tang W, Deng W J, Zheng L G et al. Calculation of removal function of ion beam figuring and polishing experiment[J]. Optics and Precision Engineering, 23, 31-39(2015).

[12] Wu J F. Research on the ion beam figuring technology[D]. Changchun: University of Chinese Academy of Sciences, 40-42(2010).

[13] Tang W. Research on removal model and technology for ion beam figuring large aspherical mirror[D]. Changchun: University of Chinese Academy of Sciences, 31-39(2016).

[14] Duan G P. Study on removal characteristics of ion beam polishing[D]. Beijing: University of Chinese Academy of Sciences, 32-33(2013).

[15] Wang Z Y, Zhang L X, Sun P F et al. Mathematical modeling method for generation of Gaussian-type removal function in fluid jet polishing[J]. Acta Optica Sinica, 38, 1022002(2018).

[16] Li J, Zhang L X, Sun P F et al. Fast generation method of Gaussian-shaped removal function of fluid jet polishing[J]. Acta Optica Sinica, 38, 0722002(2018).

[17] Xi J P, Li B, Ren D X et al. Research progress of measurement technology for large-diameter aspheric elements on grinding stage[J]. Laser & Optoelectronics Progress, 55, 030008(2018).