Accuracy in Refractive Index Measurement of As<sub>2</sub>Se<sub>3</sub> Chalcogenide Glass by IR Spectroscopic Ellipsometer

Yang Li; Yongxing Liu; Shixun Dai; Tiefeng Xu; Changgui Lin; Feifei Chen

doi:10.3788/AOS201838.0612002

Acta Optica Sinica, Volume. 38, Issue 6, 0612002(2018)

Accuracy in Refractive Index Measurement of As₂Se₃ Chalcogenide Glass by IR Spectroscopic Ellipsometer

Yang Li^1,2, Yongxing Liu^1,2, Shixun Dai^1,2, Tiefeng Xu^1,2、*, Changgui Lin^1,2, and Feifei Chen^1,2

¹ Laboratory of Infrared Materials and Devices, Research Institute of Advanced Technologies, Ningbo University, Ningbo, Zhejiang 315211, China

² Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo, Zhejiang 310027, China

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Figures & Tables(8)

Fig. 1. Schematic of physical model

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$Refractive indices and errors of specimens with different thicknesses$

Fig. 2. Refractive indices and errors of specimens with different thicknesses

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Fig. 3. Surface structural diagrams of specimens with different back side roughnesses. (a) S1; (b) S2; (c) S3

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$Refractive indices and errors of specimens with different back side roughnesses$

Fig. 4. Refractive indices and errors of specimens with different back side roughnesses

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Fig. 5. Surface roughness of specimens versus polishing time

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$Refractive indices and errors of specimens with different surface smoothnesses$

Fig. 6. Refractive indices and errors of specimens with different surface smoothnesses

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Table 1. Refractive indices of As2Se3 prism glass specimens
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Table 1. Refractive indices of As2Se3 prism glass specimens
Wavelength /μm 2 3 4 5 6 7 8 9 10 11 12
Refractive index 2.8219 2.8039 2.7964 2.7926 2.7898 2.7873 2.7850 2.7823 2.7795 2.7766 2.7737

Table 2. Parameters of specimens with different back side roughnesses
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Table 2. Parameters of specimens with different back side roughnesses
Sample No. $\begin{matrix} {R_{Z}}_{} \end{matrix}$ /μm Thickness /mm Diameter /mm
S1 2.49 2 50
S2 0.95 2 50
S3 0.66 2 50

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Yang Li, Yongxing Liu, Shixun Dai, Tiefeng Xu, Changgui Lin, Feifei Chen. Accuracy in Refractive Index Measurement of As₂Se₃ Chalcogenide Glass by IR Spectroscopic Ellipsometer[J]. Acta Optica Sinica, 2018, 38(6): 0612002

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