[1] 李文静, 周金运, 林清华. 折叠式激光投影光刻物镜的设计研究[J]. 光电工程, 34, 46(2007).

     LI W J, ZHOU J Y, LIN Q H. Design of fold laser projection lithography lens[J]. Opto-Electronic Engineering, 34, 46(2007).

[2] 祁锰, 李宏, 郭忠达. 中心偏误差对非球面透射式光学系统像差的影响[J]. 光学与光电技术, 20, 134-139(2022).

     QI M, LI H, GUO Z D et al. Center offset error of aspheric transmission type optical system aberration[J]. Optics & Optoelectronic Technology, 20, 134-139(2022).

[3] 郭帮辉. 基于镜面间隔和中心偏差测量的光学镜头辅助装调设备的研究[D](2014).

     GUO B H. Research on Optical Lens-Aided Assembly and Adjustment Equipment based on Mirror Interval and Center Deviation Measurement[D](2014).

[4] BEIER M, GEBHARDT A, EBERHARDT R et al. Lens centering of aspheres for high-quality optics[J]. Advanced Optical Technologies, 1, 441-446(2012).

[5] GREEN M E, GARDEN R P. Active alignment technique for measuring tilt errors in aspheric surfaces during optical assembly using lens alignment station （LAS）[P].

[6] RUPRECHT A, DUMITRESCU E. Measurement of the positions of centres of curvature of optical surfaces of a single or multi-lens optical system[P].

[7] LANGEHANENBERG P, STUDER J, BERIŠA K. Complete and efficient opto-mechanical characterization of IR lens assemblies[C](2022).

[8] WANG W, DU Z, CHENG R et al. Automatic measurement of center deviation of lens of laser differential confocal[J]. Opt. Precision Eng., 31, 3405-3413(2023).

     王伟, 杜卓, 程然. 激光差动共焦透镜中心偏的自动测量[J]. 光学 精密工程, 31, 3405-3413(2023).

[9] ZHUANG Y G, ZHANG G W, ZHAO W Q et al. Differential confocal radius of curvature measurement method for five-dimensional position monitoring[J]. Opt. Precision Eng., 31, 975-981(2023).

     庄雨晴, 章广威, 赵维谦. 五维位姿监测的差动共焦曲率半径测量[J]. 光学 精密工程, 31, 975-981(2023).

[10] HOPKINS H H, TIZIANI H J. A theoretical and experimental study of lens centring errors and their influence on optical image quality[J]. British Journal of Applied Physics, 17, 33-54(1966).

[11] 云自修. 中心偏检测仪器概况[J]. 西安工业大学学报, 4, 65-72(1984).

     YUN Z X. General situation of eccentric testing instruments[J]. Journal of Xi'An Institute of Technology, 4, 65-72(1984).

[12] 葛洪, 王允, 邱丽荣. 高精度共焦自准直中心偏测量装置[J]. 光学技术, 44, 681-685(2018).

     GE H, WANG Y, QIU L R. Confocal self-collimation decentration measurement structure with high accuracy[J]. Optical Technique, 44, 681-685(2018).

[13] 罗杰, 刘子豪, 刘一郡. 基于卡尔曼预测的差动共焦轮廓跟踪测量方法[J]. 仪器仪表学报, 44, 25-32(2023).

     LUO J, LIU Z H, LIU Y J et al. Differential confocal profile tracking measurement method based on Kalman prediction[J]. Chinese Journal of Scientific Instrument, 44, 25-32(2023).

[14] 伍洲, 李杨, 相里斌. 全视场外差长腔干涉测量技术[J]. 光学学报, 39(2019).

     WU Z, LI Y, XIANGLI B et al. Full-field heterodyne long-cavity interferometry[J]. Acta Optica Sinica, 39(2019).

[15] FAN G X, LI Y, ZHANG W X et al. Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies[J]. Infrared and Laser Engineering, 51, 132-140(2022).

     樊国翔, 李杨, 张文喜. 全视场外差移相双波长干涉面形检测技术[J]. 红外与激光工程, 51, 132-140(2022).

[16] LI X H, CUI C. Grating interferometric precision nanometric measurement technology[J]. Opt. Precision Eng., 32, 2591-2611(2024).

     李星辉, 崔璨. 光栅干涉精密纳米测量技术[J]. 光学 精密工程, 32, 2591-2611(2024).

[17] MALACARA D[M]. Optical Shop Testing(2007).

[18] MILLSTONE D B. Edge Response Characteriza⁃ tion of Interferometers and the Effect of Aberrations[D](2017).