Fig. 1. Block diagram of centering error measuring system

Fig. 2. Relationship between stripe number and curvature of the test lens when using different reference lens

Fig. 3. Measurement of centering error

Fig. 4. Relationship between phase error caused by laser intensity and measured phase

Fig. 5. Relation between Zernike coefficient measurement error and laser energy fluctuation

Fig. 6. Error caused by 0.2% laser energy fluctuation

Fig. 7. Relationship between phase error caused by heterodyne frequency and measured phase

Fig. 8. Relationship between Zernike coefficient measurement error and heterodyne frequency fluctuation

Fig. 9. Error caused by 0.02 Hz heterodyne frequency fluctuation

Fig. 10. Centering error measurement system

Fig. 11. Centering error measurement process