Optics and Precision Engineering, Volume. 33, Issue 8, 1179(2025)
Research on centering error measurement technology based on full-field heterodyne
To meet the increasing demands for greater precision in measuring the centering error of optical lenses, this paper proposed a centering error measurement method based on full-field heterodyne interferometry. This method used the actual optical axis of the test lens as the measurement reference, obtained the wavefront by measuring the interference fringes generated by the reflected beam of the measured lens and the reference beam, and performed Zernike polynomial fitting. The tilt coefficients of the Zernike polynomials were then converted into the centering error of the test lens, achieving high-precision measurement of the centering error and eliminating the reliance on an external rotational stage. Based on heterodyne interference and centering error principle, the influence of laser intensity fluctuations and heterodyne frequency fluctuations on wavefront and decenter measurement results was analyzed. The results showed that measurement errors were positively correlated with laser intensity and heterodyne frequency fluctuations and were also affected by the curvature and decenter of the test lens. A decenter measurement system based on heterodyne interferometry was constructed, achieving high-precision decenter measurement, which was compared with simulation results. The simulation results show that the measurement accuracy of the system is not less than 0.06″, and experimental results validated the simulations. The study indicates that, compared to traditional autocollimation-based decenter measurement methods, the heterodyne interferometry method can achieve higher measurement accuracy.
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Yongkang YANG, Anqi LIU, Wenxi ZHANG, Zhou WU. Research on centering error measurement technology based on full-field heterodyne[J]. Optics and Precision Engineering, 2025, 33(8): 1179
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Received: Jan. 14, 2025
Accepted: --
Published Online: Jul. 1, 2025
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