Journal of Semiconductors, Volume. 45, Issue 12, 122102(2024)

Growth, characterization, and transport calculation of Ge/SiGe heterojunction: strategy for the growth of undoped Ge quantum wells

Yiwen Zhang, Jun Deng, Zonghu Li, Xinyou Liu, Haiou Li, Baochuan Wang, Jun Luo, Zhenzhen Kong*, Gang Cao, Guoping Guo, Chao Zhao, and Guilei Wang**
Author Affiliations
  • Laboratory of Fabrication Technologies for Integrated Circuits, Chinese Academy of Sciences, Beijing 100029, China
  • show less
    Figures & Tables(11)
    (Color online) (a) Quantum well structure diagram. (b) Hall bar structure diagram and test schematic diagram.
    (Color online) The corresponding range of strains of LS (lightly-strained QW), SS (standard-strained QW), HS (heavily-strained QW) and ΔE(HH−LH) is calculated using VSAP.
    (Color online) (a) HRXRD analysis of the lightly-strained QW. The green line shows the quantum well shifting leftward as strain increases. (b) AFM analysis of the lightly-strained QW (10 μm × 10 μm Rq = 2.03 nm).
    (Color online) SdH oscillation of each sample at near saturation density at 250 mK. (a) Transverse resistance. (b) Longitudinal resistance and fill factor ν.
    (Color online) Electrical and magneto-transport measurements at 250 mK of Hall-bar shaped HFET. (a) Mobility μ vs carrier density p2DHG. Transport parameters are shown in Table 1. In the local zoom-in of (a), the blue curve corresponds to the fitted curve of mobility μ versus carrier density p at low carrier density, while the red curve corresponds to the fitted curve at high carrier density. (b) Longitudinal conductivity σxx vs carrier density p2DHG. The green curve is fitted by σxx ∝ (p2DHG − pp)p, p = 2. The confidence intervals of both fits are larger than 0.999.
    (Color online) (a) Quantum well structure model. (b) Quantum well barrier energy band model under gate voltage control.
    (Color online) (a) Correlation curve between barrier layer components and percolation density. (b) Correlation curve between quantum well thickness and percolation density. (c) Correlation curve between quantum well depth and percolation density. (d) A contour map of pp constructed by overlaying our calculated data on the thickness-depth phase diagram.
    (Color online) The density of tunneling carriers at 250 mK corresponds to (a) a quantum well (QW) depth of 20 nm, where tunneling does not occur; (b) a QW depth of 30 nm, with a very small probability of tunneling; (c) a QW depth of 40 nm, with a significantly higher probability of tunneling.
    (Color online) The amplitude change is fitted as a function of T, normalized at Δρ0 = Δρ (T0 = 250 mK). The red solid circle corresponds to the HS sample with an effective mass of 0.091 m0; the black solid diamond corresponds to the SS sample with an effective mass of 0.083 m0; and the blue solid circle corresponds to the LS sample with an effective mass of 0.073 m0.
    (Color online) Mixed transport model of light and heavy hole subbands. (a) Light and heavy hole subbands under strain. (b) Carrier transport mode in which only the heavy hole subband participates under strain. (c) Mixed transport mode of light and heavy hole subbands under strain. (d) State density DOS (density of states) distribution diagram of the Fermi level EF corresponding to the light and heavy hole subbands.
    • Table 1. Material key structural parameters and magnetic transport test results.

      View table
      View in Article

      Table 1. Material key structural parameters and magnetic transport test results.

      Key structural parameters
      LayerLS QWSS QWHS QW
      QW depth (nm)22.720.215.1
      QW thickness (nm)3736.324.07
      Strain (%)−0.43−0.61−1.19
      Magnetic-transport data
      LayerLS QWSS QWHS QW
      Mobility (cm2∙V−1∙s−1)73.01 × 10453.47 × 10433.82 × 104
      βhigh2.180.401.27
      βlow11.5116.953.46
      m* (m0)0.0730.0830.091
      pp (cm−2)4.7 × 10105.4 × 101014.24 × 1010
      g*11.099.868.3
      α20.2228.9333.33
    Tools

    Get Citation

    Copy Citation Text

    Yiwen Zhang, Jun Deng, Zonghu Li, Xinyou Liu, Haiou Li, Baochuan Wang, Jun Luo, Zhenzhen Kong, Gang Cao, Guoping Guo, Chao Zhao, Guilei Wang. Growth, characterization, and transport calculation of Ge/SiGe heterojunction: strategy for the growth of undoped Ge quantum wells[J]. Journal of Semiconductors, 2024, 45(12): 122102

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Research Articles

    Received: Aug. 23, 2024

    Accepted: --

    Published Online: Jan. 15, 2025

    The Author Email: Zhenzhen Kong (ZZKong), Guilei Wang (GLWang)

    DOI:10.1088/1674-4926/24080034

    Topics