Journal of Semiconductors, Volume. 45, Issue 12, 122102(2024)
Growth, characterization, and transport calculation of Ge/SiGe heterojunction: strategy for the growth of undoped Ge quantum wells
Fig. 1. (Color online) (a) Quantum well structure diagram. (b) Hall bar structure diagram and test schematic diagram.
Fig. 2. (Color online) The corresponding range of strains of LS (lightly-strained QW), SS (standard-strained QW), HS (heavily-strained QW) and
Fig. 3. (Color online) (a) HRXRD analysis of the lightly-strained QW. The green line shows the quantum well shifting leftward as strain increases. (b) AFM analysis of the lightly-strained QW (10 μm × 10 μm Rq = 2.03 nm).
Fig. 4. (Color online) SdH oscillation of each sample at near saturation density at 250 mK. (a) Transverse resistance. (b) Longitudinal resistance and fill factor ν.
Fig. 5. (Color online) Electrical and magneto-transport measurements at 250 mK of Hall-bar shaped HFET. (a) Mobility μ vs carrier density p2DHG. Transport parameters are shown in
Fig. 6. (Color online) (a) Quantum well structure model. (b) Quantum well barrier energy band model under gate voltage control.
Fig. 7. (Color online) (a) Correlation curve between barrier layer components and percolation density. (b) Correlation curve between quantum well thickness and percolation density. (c) Correlation curve between quantum well depth and percolation density. (d) A contour map of pp constructed by overlaying our calculated data on the thickness-depth phase diagram.
Fig. 8. (Color online) The density of tunneling carriers at 250 mK corresponds to (a) a quantum well (QW) depth of 20 nm, where tunneling does not occur; (b) a QW depth of 30 nm, with a very small probability of tunneling; (c) a QW depth of 40 nm, with a significantly higher probability of tunneling.
Fig. 9. (Color online) The amplitude change is fitted as a function of T, normalized at Δρ0 = Δρ (T0 = 250 mK). The red solid circle corresponds to the HS sample with an effective mass of 0.091 m0; the black solid diamond corresponds to the SS sample with an effective mass of 0.083 m0; and the blue solid circle corresponds to the LS sample with an effective mass of 0.073 m0.
Fig. 10. (Color online) Mixed transport model of light and heavy hole subbands. (a) Light and heavy hole subbands under strain. (b) Carrier transport mode in which only the heavy hole subband participates under strain. (c) Mixed transport mode of light and heavy hole subbands under strain. (d) State density DOS (density of states) distribution diagram of the Fermi level EF corresponding to the light and heavy hole subbands.
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Yiwen Zhang, Jun Deng, Zonghu Li, Xinyou Liu, Haiou Li, Baochuan Wang, Jun Luo, Zhenzhen Kong, Gang Cao, Guoping Guo, Chao Zhao, Guilei Wang. Growth, characterization, and transport calculation of Ge/SiGe heterojunction: strategy for the growth of undoped Ge quantum wells[J]. Journal of Semiconductors, 2024, 45(12): 122102
Category: Research Articles
Received: Aug. 23, 2024
Accepted: --
Published Online: Jan. 15, 2025
The Author Email: Zhenzhen Kong (ZZKong), Guilei Wang (GLWang)