Journal of Semiconductors, Volume. 45, Issue 8, 082201(2024)
A 128 × 128 SPAD LiDAR sensor with column-parallel 25 ps resolution TA-ADCs
Figures & Tables(13)
Fig. 1. (Color online) A typical direct time-of-flight LiDAR system.
Fig. 4. (Color online) Pixel schematic with passive quench and tri-state readout buffer.
Fig. 9. (Color online) Micrograph and characteristics of the chip.
Fig. 10. (Color online) Measured INL and DNL of the TA-ADC’s lower 9 bits.
Fig. 11. (Color online) Distance measurement. (a) Measured distance. (b) Accuracy and precision.
Fig. 12. (Color online) (a) 2D image and (b) 3D point cloud image.
Table 1. Comparison with other SPAD flash LIDAR sensors.
View tableView in ArticleTable 1. Comparison with other SPAD flash LIDAR sensors.
Parameters Unit This work Ref. [ 8 ]Ref. [ 2 ]Ref. [ 14 ](a) For the lower 9 bits. (b) For the lower 22 bits. (c) Size of the 64 × 64 pixel array. (d) Estimated for Nth = 1, at 2m, system1. (e) (pJ/pixel). Technology − 180 nm 130 nm HV 350 nm HV 180 nm HV Pixel array − 128 × 128 64 × 64 32 × 128 32 × 32 Pixel pitch μm 30 60 × 51 40 60 Fill factor % 10 0.66 35 7.2 Timing technique − TA-ADC Counter + TII with off-chip ADC Delay line TDC RO TDC Time res. [1LSB] ps 25 13 78 200 Timing depth bit 12 24 13 13 Timing DNL LSB ps 0.77 (a) 19.3 (a) 0.47 (b) 6.1 (b) 0.83 65 0.29 58 Timing INL LSB ps 2.2 (a) 55 (a) 14.4 (b) 187 (b) 1.24 97 2.53 506 Image distance m 0.5 50 3.5 3.5−9 Depth precision m 0.0077 N/A <0.02 0.02(d) Depth accuracy m 0.0147 0.0073 N/A 0.03(d) Inter-frame rate kHz 25 8.3 23 270 Chip size mm2 5.2 × 6.2 3.9 × 3.3(c) 5.5 × 6.6 2.9 × 2.9 Power consumption mW 190 733 180 240 FoM(e) pJ/pixel 7.14 N/A 10.92 1.93
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Na Tian, Zhe Wang, Kai Ma, Xu Yang, Nan Qi, Jian Liu, Nanjian Wu, Runjiang Dou, Liyuan Liu. A 128 × 128 SPAD LiDAR sensor with column-parallel 25 ps resolution TA-ADCs[J]. Journal of Semiconductors, 2024, 45(8): 082201
Paper Information
Category: Articles
Received: Mar. 18, 2024
Accepted: --
Published Online: Aug. 27, 2024
The Author Email: Runjiang Dou (dourj@semi.ac.cn), Liyuan Liu (liuly@semi.ac.cn)
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