Infrared and Laser Engineering, Volume. 44, Issue 9, 2761(2015)

Study of the evolution of refractive inhomogeneity in HfO 2 thin films

Bao Ganghua1,2, Cheng Xinbin1,2, Jiao Hongfei1,2、*, Liu Huasong3, and Wang Zhanshan1,2
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    Bao Ganghua, Cheng Xinbin, Jiao Hongfei, Liu Huasong, Wang Zhanshan. Study of the evolution of refractive inhomogeneity in HfO 2 thin films[J]. Infrared and Laser Engineering, 2015, 44(9): 2761

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    Paper Information

    Category: 光电器件与材料

    Received: Jan. 15, 2015

    Accepted: Feb. 23, 2015

    Published Online: Jan. 26, 2016

    The Author Email: Hongfei Jiao (jiaohf@tongji.edu.cn)

    DOI:

    CSTR:32186.14.

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