Chinese Journal of Lasers, Volume. 31, Issue 6, 698(2004)
Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition
[1] [1] T. Inokuma, Y. Wakayama, T. Muramoto et al.. Optical properties of Si clusters and Si nanocrystallites in high-temperature annealed SiOx films [J]. J. Appl. Phys., 1998, 83(4):2228~2234
[2] [2] T. S. Iwayama, K. Fujita, S. Nakao et al.. Visible photoluminescence in Si+-implanted silica glass [J]. J. Appl. Phys., 1994, 75(12):7779~7783
[3] [3] T. Yasuda, M. Nishizawa, S. Yamasaki et al.. Controlled bond formation between chemical vapor deposition Si and ultrathin SiO2 layers [J]. J. Vac. Sci. Technol. B, 2000, 18(3):1752~1756
[4] [4] E. Werwa, A. A. Seraphin, L. A. Chiu et al.. Synthesis and processing of silicon nanocrystallites using a pulsed laser ablation supersonic expansion method [J]. Appl. Phys. Lett., 1994, 64(14):1821~1823
[5] [5] T. Scharf, H. U. Krebs. Influence of inert gas pressure on deposition rate during pulsed laser deposition [J]. Appl. Phys. A, 2002, 75(5):551~554
[6] [6] T. Yoshida, S. Takeyama, Y. Yamada et al.. Nanometer-sized silicon crystallites prepared by excimer laser ablation in constant pressure inert gas [J]. Appl. Phys. Lett., 1996, 68(13):1772~1774
[7] [7] A. Hadjadj, L. Boufendi, S. Huet et al.. Role of the surface roughness in laser induced crystallization of nanostructured silicon films [J]. J. Vac. Sci. Technol. A, 2000, 18(2):529~535
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2004, 31(6): 698