Chinese Journal of Lasers, Volume. 31, Issue 6, 698(2004)
Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2004, 31(6): 698
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