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Chinese Journal of Lasers, Volume. 31, Issue 6, 698(2004)

Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]1
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  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of Inert Gas Pressure on the Surface Roughness of Silicon Film Prepared by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2004, 31(6): 698

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    Paper Information

    Category: materials and thin films

    Received: Feb. 19, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (hdwangyl@sina.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology