Acta Optica Sinica, Volume. 39, Issue 12, 1212006(2019)

Traceable Dimensional Measurement for Lattices Based on Contour Features

Shixiang Su, Ning Dai*, Xiaosheng Cheng, Changjiang Yu, and Pengfu Lei
Author Affiliations
  • College of Mechanical and Electrical Engineering, Nanjing University of Aeronauticsand Astronautics, Nanjing, Jiangsu 210016, China
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    References(21)

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    [20] Villarraga-Gómez H, Smith S T. Magnification dependent MPE-equation for dimensional X-ray CT metrology. [C]∥Proceedings of euspen’s 17th International Conference & Exhibition, May 2017, Hannover, Germany. UK: Euspen, 1-2(2017).

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    Shixiang Su, Ning Dai, Xiaosheng Cheng, Changjiang Yu, Pengfu Lei. Traceable Dimensional Measurement for Lattices Based on Contour Features[J]. Acta Optica Sinica, 2019, 39(12): 1212006

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 9, 2019

    Accepted: Sep. 2, 2019

    Published Online: Dec. 6, 2019

    The Author Email: Dai Ning (dai_ning@nuaa.edu.cn)

    DOI:10.3788/AOS201939.1212006

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