Acta Optica Sinica, Volume. 39, Issue 12, 1212006(2019)
Traceable Dimensional Measurement for Lattices Based on Contour Features
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Shixiang Su, Ning Dai, Xiaosheng Cheng, Changjiang Yu, Pengfu Lei. Traceable Dimensional Measurement for Lattices Based on Contour Features[J]. Acta Optica Sinica, 2019, 39(12): 1212006
Category: Instrumentation, Measurement and Metrology
Received: May. 9, 2019
Accepted: Sep. 2, 2019
Published Online: Dec. 6, 2019
The Author Email: Dai Ning (dai_ning@nuaa.edu.cn)