Chinese Journal of Lasers, Volume. 52, Issue 4, 0402403(2025)

Femtosecond Laser‐Induced Grid‐Like Periodic Surface Structure on Silicon Substrate and Its Preliminary Application

Zhaoxu Li1, Hao Chen1, Mingyang Han1, Xiao Yang1, and Shi Bai1,2、*
Author Affiliations
  • 1Hebei Key Laboratory of Materials Near-Net-Forming Technology, School of Material Science and Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, Hebei , China
  • 2Advanced Laser Processing Research Team, RIKEN Center for Advanced Photonics, Wako351-0198, Saitama , Japan
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    References(46)

    [14] He W L, Qin Y J. Formation of subwavelength periodic surface structure and mechanism study on 6H-SiC surface[J]. Chinese Journal of Lasers, 51, 2402404(2024).

    [15] Jia X, Jia T Q, Sun Z R et al. Multiple femtosecond lasers induce one- and two-dimensional nanoperiodic structures on CdS, SiC, and GaN surfaces[J]. Chinese Science Bulletin, 53, 1763-1767(2008).

    [17] Mei W. Simulation and experimental study on periodic micro-nano surface structure of silicon induced by femtosecond laser[D], 41-47(2019).

    [28] Ji X. Geometrical morphologies adjustment of micro/nanostructures on the silicon surface induced by femtosecond laser[D], 13-59(2015).

    [29] Yang M. Femtosecond laser induced micro-/nano-structures on silicon[D], 47-60(2014).

    [39] Reif J, Varlamova O, Bounhalli M et al. Long-time feedback in the formation of self-organized nanostructures upon multipulse femtosecond laser ablation[C], 1278, 446-456(2010).

    [44] Shi L P, Geng J, Qiu M. Influence of scanning direction on the quality of lipss on metal-Si hybrid films (invited)[J]. Acta Photonica Sinica, 52, 0752303(2023).

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    Zhaoxu Li, Hao Chen, Mingyang Han, Xiao Yang, Shi Bai. Femtosecond Laser‐Induced Grid‐Like Periodic Surface Structure on Silicon Substrate and Its Preliminary Application[J]. Chinese Journal of Lasers, 2025, 52(4): 0402403

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: May. 16, 2024

    Accepted: Jul. 2, 2024

    Published Online: Jan. 17, 2025

    The Author Email: Bai Shi (shi.bai@riken.jp)

    DOI:10.3788/CJL240884

    CSTR:32183.14.CJL240884

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