Chinese Journal of Lasers, Volume. 52, Issue 4, 0402403(2025)
Femtosecond Laser‐Induced Grid‐Like Periodic Surface Structure on Silicon Substrate and Its Preliminary Application
Fig. 1. Schematic diagram of femtosecond laser-induced periodic surface structure processing system
Fig. 2. SEM images of the irradiated region of the silicon at different pulses at a laser fluence of 0.28 J/cm2, where the double arrow shows the laser polarization direction
Fig. 3. Surface morphology and scale change under different characterization methods at a laser fluence of 0.28 J/cm2. (a) SEM image;(b) laser confocal microscopy image;(c) surface structure scale change
Fig. 4. SEM images of the irradiated region of the silicon at different laser fluences
Fig. 5. Range of laser processing parameters for the formation of grid-like periodic surface structure
Fig. 7. Schematic diagrams of femtosecond laser performing linear scanning and structural color measurement on the surface of a target. (a) Linear scanning; (b) scanning path; (c) schematic diagram of a structural color measurement system
Fig. 8. Color rendering of the surface of the target at different viewing angles ( HEB: horizontal polarization; UST: vertical polarization)
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Zhaoxu Li, Hao Chen, Mingyang Han, Xiao Yang, Shi Bai. Femtosecond Laser‐Induced Grid‐Like Periodic Surface Structure on Silicon Substrate and Its Preliminary Application[J]. Chinese Journal of Lasers, 2025, 52(4): 0402403
Category: Laser Micro-Nano Manufacturing
Received: May. 16, 2024
Accepted: Jul. 2, 2024
Published Online: Jan. 17, 2025
The Author Email: Bai Shi (shi.bai@riken.jp)
CSTR:32183.14.CJL240884