Chinese Journal of Lasers, Volume. 52, Issue 4, 0402403(2025)

Femtosecond Laser‐Induced Grid‐Like Periodic Surface Structure on Silicon Substrate and Its Preliminary Application

Zhaoxu Li1, Hao Chen1, Mingyang Han1, Xiao Yang1, and Shi Bai1,2、*
Author Affiliations
  • 1Hebei Key Laboratory of Materials Near-Net-Forming Technology, School of Material Science and Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, Hebei , China
  • 2Advanced Laser Processing Research Team, RIKEN Center for Advanced Photonics, Wako351-0198, Saitama , Japan
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    Figures & Tables(8)
    Schematic diagram of femtosecond laser-induced periodic surface structure processing system
    SEM images of the irradiated region of the silicon at different pulses at a laser fluence of 0.28 J/cm2, where the double arrow shows the laser polarization direction
    Surface morphology and scale change under different characterization methods at a laser fluence of 0.28 J/cm2. (a) SEM image;(b) laser confocal microscopy image;(c) surface structure scale change
    SEM images of the irradiated region of the silicon at different laser fluences
    Range of laser processing parameters for the formation of grid-like periodic surface structure
    SEM images of “split” fringes at different laser fluences
    Schematic diagrams of femtosecond laser performing linear scanning and structural color measurement on the surface of a target. (a) Linear scanning; (b) scanning path; (c) schematic diagram of a structural color measurement system
    Color rendering of the surface of the target at different viewing angles ( HEB: horizontal polarization; UST: vertical polarization)
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    Zhaoxu Li, Hao Chen, Mingyang Han, Xiao Yang, Shi Bai. Femtosecond Laser‐Induced Grid‐Like Periodic Surface Structure on Silicon Substrate and Its Preliminary Application[J]. Chinese Journal of Lasers, 2025, 52(4): 0402403

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: May. 16, 2024

    Accepted: Jul. 2, 2024

    Published Online: Jan. 17, 2025

    The Author Email: Bai Shi (shi.bai@riken.jp)

    DOI:10.3788/CJL240884

    CSTR:32183.14.CJL240884

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