Acta Optica Sinica, Volume. 43, Issue 16, 1623019(2023)
Fabrication of Microlens Arrays with High Numerical Aperture Based on Femtosecond Laser Self-Modulating Processing Method
Figures & Tables(8)
Fig. 1. Change of spot geometry caused by spherical aberration when laser focusing across a plane interface from air into the sample
Fig. 3. Comparison of the process of forming microlens by wet etching. (a) Comparison of etching process between front-side processing method and self-modulating processing method; (b) confocal 3D images of the structure with regular front-side processing method when etching 0 min, 20 min, and 70 min; (c) confocal 3D images of the structure with self-modulating method when etching 0 min, 20 min, and 70 min
Fig. 4. Morphology parameters of microlenses processed by self-modulating method with different pulse energies. (a) Confocal microscope pictures of microlenses at different pulse energies; (b) cross-section profiles of microlenses prepared at different pulse energies; (c) numerical aperture and radius of curvature of the microlens vary with the pulse energy
Fig. 5. Comparison of microlens morphology parameters prepared by self-modulating processing method and regular front-side processing method when changing the defocus position. (a) Morphologies of microlenses at different defocus positions using self-modulating processing method,(i) shows the optical microscope images of microlenses with defocus positions from 1 μm to 7 μm, and (ii) shows the confocal sectional profile of microlenses with defocus position from 8 μm to 14 μm; (b) diameter and depth changed with defocus position during self-modulating processing; (c)
Fig. 6. Morphological characterization and imaging results of large-area microlens arrays. (a) Optical microscope images; (b) scanning electron microscopy images; (c) imaging results tested by optical microscopy; (d) focusing results tested by optical microscopy
Fig. 7. Morphological characterization and imaging results of microlenses with different
Table 1.
for the microlens fabricated by self-modulating processing method and corresponding information reported in relevant references View tableTable 1.
for the microlens fabricated by self-modulating processing method and corresponding information reported in relevant references Material Method Laser parameter Ref. Fused silica Self-modulating 1030 nm & 300 fs 1.46 0.46 This work Fused silica Temporally shaped femtosecond laser 800 nm & 50 fs 1.46 0.46 ［ 19 ］Fused silica Spatial light modulation 650 nm 1.46 0.46 ［ 18 ］Fused silica Spatial light modulation 514 nm & 190 fs 1.46 0.41 ［ 26 ］Fused silica Spatial light modulation 514 nm & 230 fs 1.46 0.40 ［ 7 ］Silica glass Acousto-optic modulation 343 nm & 600 fs 1.46 0.17 ［ 27 ］K9 glass Front-side with scanning depth 800 nm & 35 fs 1.46 0.45 ［ 28 ］Fused silica Circularly polarized laser processing at front-side with scanning depth 800 nm&50 fs 1.52 0.47 ［ 29 ］Silica glass Regular front-side 800 nm & 30 fs 1.45 0.26 ［ 30 ］Glass Regular front-side 1030 nm & 300 fs 1.46 0.23 ［ 31 ］
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Xinran Yuan, Jingyang Deng, Dihua Xu, Xiangchao Sun, Yanhao Yu, Qidai Chen. Fabrication of Microlens Arrays with High Numerical Aperture Based on Femtosecond Laser Self-Modulating Processing Method[J]. Acta Optica Sinica, 2023, 43(16): 1623019
Paper Information
Category: Optical Devices
Received: May. 4, 2023
Accepted: Jun. 7, 2023
Published Online: Aug. 1, 2023
The Author Email: Yu Yanhao (yanhao_yu@jlu.edu.cn)
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