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Acta Optica Sinica, Volume. 43, Issue 16, 1623019(2023)

Fabrication of Microlens Arrays with High Numerical Aperture Based on Femtosecond Laser Self-Modulating Processing Method

Xinran Yuan1, Jingyang Deng1, Dihua Xu1, Xiangchao Sun2, Yanhao Yu2、*, and Qidai Chen2
Author Affiliations
  • 1Guangdong Zhengye Technology Co., Ltd., Dongguan 523000, Guangdong, China
  • 2College of Electronic Science & Engineering, Jilin University, Changchun 130012, Jilin, China
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    Article index updated: Mar. 10, 2025

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    Xinran Yuan, Jingyang Deng, Dihua Xu, Xiangchao Sun, Yanhao Yu, Qidai Chen. Fabrication of Microlens Arrays with High Numerical Aperture Based on Femtosecond Laser Self-Modulating Processing Method[J]. Acta Optica Sinica, 2023, 43(16): 1623019

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    Paper Information

    Category: Optical Devices

    Received: May. 4, 2023

    Accepted: Jun. 7, 2023

    Published Online: Aug. 1, 2023

    The Author Email: Yu Yanhao (yanhao_yu@jlu.edu.cn)

    DOI:10.3788/AOS230896

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology