Chinese Journal of Lasers, Volume. 49, Issue 16, 1602016(2022)

Fabrication of LIG/RuO2 Composite Electrode by Femtosecond Laser Direct Writing

Lianfu Wang, Yanchao Guan, Ye Ding**, Jingyi Li, and Lijun Yang*
Author Affiliations
  • Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin 150001, Heilongjiang, China
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    Figures & Tables(11)
    Single-wire resistances and line widths under different powers and scanning speeds. (a) Single-wire resistance; (b) line width
    Determination of sweeping line clearance. (a) SEM image of carbonized surface by single-line scanning; (b) SEM image of carbonized side by single-line scanning; (c) schematic of resistance measurement of carbide electrode; (d) structural diagram of interdigital electrode
    Preparation of LIG and LIG/RuO2 electrodes. (a) Schematic of preparation of LIG electrode; (b) schematic of preparation of LIG/RuO2 electrode; (c) PI film fixed on glass slide; (d) PI film with RuCl3 sprayed on its surface; (e) interdigital electrode array; (f) formed interdigital electrode
    Micro-nano structure of electrode and EDS characterization. (a) SEM image of LIG/RuO2 electrode surface; (b) porous structure inside LIG electrode; (c) micro-nano structure of LIG/RuO2 electrode surface; (d) micro-nano structure inside LIG/RuO2 electrode; (e) flocculent structure of LIG/RuO2 electrode surface; (f) element content in flocculent structure
    EDS scanning results of LIG/RuO2 electrode surface. (a) C element distribution; (b) N element distribution; (c) O element distribution; (d) Cl element distribution; (e) Ru element distribution; (f) atomic fraction of each element
    Raman and XPS characterization of electrodes. (a) Raman spectrum of LIG electrode; (b) XPS peak splitting curves of LIG/RuO2 electrode
    Cyclic voltammetric curves of electrodes with different interdigital spacings at voltage sweeping speed of 10 mV/s. (a) Cyclic voltammetric curves of LIG electrodes; (b) cyclic voltammetric curves of LIG/RuO2 electrodes
    Capacitance comparison of LIG electrode and LIG/RuO2 electrode at voltage sweeping speed of 10 mV/s. (a) Capacitance comparison under different interdigital spacings; (b) comparison of cyclic voltammetric curves under 20 μm interdigital spacing
    Rate performance comparison of LIG electrode and LIG/RuO2 electrode. (a) LIG electrode; (b) LIG/RuO2 electrode
    Constant current charge-discharge curves and impedance spectrum of LIG/RuO2 electrode. (a) Constant current charge- discharge curves of LIG/RuO2 electrode under different current densities; (b) impedance spectrum of LIG/RuO2 electrode
    • Table 1. Ultrasonic spray coating parameters of RuCl3

      View table

      Table 1. Ultrasonic spray coating parameters of RuCl3

      ParameterSubstrate temperature /℃Pressure /MPaFlow /(mL·min-1)Number of spray coating layers
      Value600.030.250
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    Lianfu Wang, Yanchao Guan, Ye Ding, Jingyi Li, Lijun Yang. Fabrication of LIG/RuO2 Composite Electrode by Femtosecond Laser Direct Writing[J]. Chinese Journal of Lasers, 2022, 49(16): 1602016

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    Paper Information

    Category: laser manufacturing

    Received: Nov. 30, 2021

    Accepted: Jan. 5, 2022

    Published Online: Jul. 28, 2022

    The Author Email: Ding Ye (dy1992hit@hit.edu.cn), Yang Lijun (yljtj@hit.edu.cn)

    DOI:10.3788/CJL202249.1602016

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