Fabrication of LIG/RuO<sub>2</sub> Composite Electrode by Femtosecond Laser Direct Writing

Lianfu Wang; Yanchao Guan; Ye Ding; Jingyi Li; Lijun Yang

doi:10.3788/CJL202249.1602016

Chinese Journal of Lasers, Volume. 49, Issue 16, 1602016(2022)

Fabrication of LIG/RuO₂ Composite Electrode by Femtosecond Laser Direct Writing

Lianfu Wang, Yanchao Guan, Ye Ding^**, Jingyi Li, and Lijun Yang^*

Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin 150001, Heilongjiang, China

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Lianfu Wang, Yanchao Guan, Ye Ding, Jingyi Li, Lijun Yang. Fabrication of LIG/RuO₂ Composite Electrode by Femtosecond Laser Direct Writing[J]. Chinese Journal of Lasers, 2022, 49(16): 1602016

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Paper Information

Category: laser manufacturing

Received: Nov. 30, 2021

Accepted: Jan. 5, 2022

Published Online: Jul. 28, 2022

The Author Email: Ding Ye (dy1992hit@hit.edu.cn), Yang Lijun (yljtj@hit.edu.cn)

DOI:10.3788/CJL202249.1602016

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology