Chinese Journal of Lasers, Volume. 46, Issue 12, 1201001(2019)

Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers

Bin Liu1,2,3, Jinbin Ding1,3、**, Kuibo Wang1、***, Yi Zhou1,3, Rui Jiang1,3, and Yu Wang1,2、*
Author Affiliations
  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing RSLaser Opto-Electronics Technology Co., Ltd., Beijing 100176, China
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    Figures & Tables(11)
    Schematic of parallel shadow optical system
    Device for observing discharge shock wave by shadow method
    Structural diagram of discharge area
    Sequence diagram of image acquisition
    Generation and evolution of discharge shock wave. (a) Before discharge;(b) 6.5 μs; (c) 19 μs; (d) 28.5 μs; (e) 40 μs; (f) 63 μs; (g) 199 μs; (h) 285 μs
    Shock wave images from 20 μs to 31 μs. (a) 20 μs; (b) 21 μs; (c) 22 μs; (d) 23 μs;(e) 24 μs; (f) 25 μs; (g) 26 μs; (h) 27 μs; (i) 28 μs; (j) 29 μs; (k) 30 μs; (l) 31 μs
    Propagation path of transverse shock wave
    Locations of transverse shock wave from 20μs to 31 μs. (a) 20 μs; (b) 21 μs; (c) 22 μs; (d) 23 μs; (e) 24 μs; (f) 25 μs; (g) 26 μs; (h) 27 μs; (i) 28 μs; (j) 29 μs; (k) 30 μs; (l) 31 μs
    Propagation of shock wave of main electrode. (a) Generation stage of shock wave of main electrode; (b) encounter of shock waves of main electrode; (c) crossover of shock waves of main electrode; (d)(e) shock waves of main electrode continues to propagate; (f) shock waves of main electrode arrive at the opposite electrode
    Propagation of preionization shock wave. (a) Preionization shock wave location at 11 μs; (b) preionization shock wave location at 12 μs; (c) preionization shock wave location at 16 μs; (d) preionization shock wave location at 17 μs; (e) preionization shock wave location at 18 μs; (f) preionization shock wave location at 19 μs
    • Table 1. Repetitionrates are possible to be affected by major shock waves

      View table

      Table 1. Repetitionrates are possible to be affected by major shock waves

      Time /μsImageRepetition frequencypossible to beaffected /Hz
      199-2204545-5025
      3063260
      670-7201380-1500,2760-3000,4140-4500,5520-6000
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    Bin Liu, Jinbin Ding, Kuibo Wang, Yi Zhou, Rui Jiang, Yu Wang. Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers[J]. Chinese Journal of Lasers, 2019, 46(12): 1201001

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    Paper Information

    Category: laser devices and laser physics

    Received: Jul. 1, 2019

    Accepted: Aug. 2, 2019

    Published Online: Dec. 2, 2019

    The Author Email: Ding Jinbin (dingjinbin@ime.ac.cn), Wang Kuibo (wangkuibo@ime.ac.cn), Wang Yu (yuwang@ime.ac.cn)

    DOI:10.3788/CJL201946.1201001

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