Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers

Bin Liu; Jinbin Ding; Kuibo Wang; Yi Zhou; Rui Jiang; Yu Wang

doi:10.3788/CJL201946.1201001

Chinese Journal of Lasers, Volume. 46, Issue 12, 1201001(2019)

Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers

Bin Liu^1,2,3, Jinbin Ding^1,3、**, Kuibo Wang^1、***, Yi Zhou^1,3, Rui Jiang^1,3, and Yu Wang^1,2、*

Author Affiliations

¹Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Beijing RSLaser Opto-Electronics Technology Co., Ltd., Beijing 100176, China

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Bin Liu, Jinbin Ding, Kuibo Wang, Yi Zhou, Rui Jiang, Yu Wang. Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers[J]. Chinese Journal of Lasers, 2019, 46(12): 1201001

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Paper Information

Category: laser devices and laser physics

Received: Jul. 1, 2019

Accepted: Aug. 2, 2019

Published Online: Dec. 2, 2019

The Author Email: Ding Jinbin (dingjinbin@ime.ac.cn), Wang Kuibo (wangkuibo@ime.ac.cn), Wang Yu (yuwang@ime.ac.cn)

DOI:10.3788/CJL201946.1201001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology