Chinese Journal of Lasers, Volume. 46, Issue 12, 1201001(2019)
Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers
The characteristics of the discharge shock waves in high-repetition-rate excimer laser discharge chambers are experimentally investigated using the shadow method. This results represent the generation and evolution of the discharge shock waves. Thus, three typical forms of discharge shock waves, i.e., transverse, longitudinal (the main electrode shock wave), and preionization shock waves, are obtained. Further, the velocities of these shock waves are estimated, and the repetition rate at which the shock waves may effect the discharge is analyzed. The results of this study support the design of discharge-shock-wave suppression devices in high-repetition-rate discharge chambers.
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Bin Liu, Jinbin Ding, Kuibo Wang, Yi Zhou, Rui Jiang, Yu Wang. Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers[J]. Chinese Journal of Lasers, 2019, 46(12): 1201001
Category: laser devices and laser physics
Received: Jul. 1, 2019
Accepted: Aug. 2, 2019
Published Online: Dec. 2, 2019
The Author Email: Ding Jinbin (dingjinbin@ime.ac.cn), Wang Kuibo (wangkuibo@ime.ac.cn), Wang Yu (yuwang@ime.ac.cn)