Chinese Journal of Lasers, Volume. 46, Issue 12, 1201001(2019)

Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers

Bin Liu1,2,3, Jinbin Ding1,3、**, Kuibo Wang1、***, Yi Zhou1,3, Rui Jiang1,3, and Yu Wang1,2、*
Author Affiliations
  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing RSLaser Opto-Electronics Technology Co., Ltd., Beijing 100176, China
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    The characteristics of the discharge shock waves in high-repetition-rate excimer laser discharge chambers are experimentally investigated using the shadow method. This results represent the generation and evolution of the discharge shock waves. Thus, three typical forms of discharge shock waves, i.e., transverse, longitudinal (the main electrode shock wave), and preionization shock waves, are obtained. Further, the velocities of these shock waves are estimated, and the repetition rate at which the shock waves may effect the discharge is analyzed. The results of this study support the design of discharge-shock-wave suppression devices in high-repetition-rate discharge chambers.

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    Bin Liu, Jinbin Ding, Kuibo Wang, Yi Zhou, Rui Jiang, Yu Wang. Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers[J]. Chinese Journal of Lasers, 2019, 46(12): 1201001

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    Paper Information

    Category: laser devices and laser physics

    Received: Jul. 1, 2019

    Accepted: Aug. 2, 2019

    Published Online: Dec. 2, 2019

    The Author Email: Ding Jinbin (dingjinbin@ime.ac.cn), Wang Kuibo (wangkuibo@ime.ac.cn), Wang Yu (yuwang@ime.ac.cn)

    DOI:10.3788/CJL201946.1201001

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