Fig. 1. Schematic diagram of the TSOM process

Fig. 2. (a) TSOM experimental setup; TSOM pseudo color images with widths of (b) 2 μm, (c) 10 μm, and (d) 30 μm. The lateral axis represents pixels and the vertical axis represents through-focus positions

Fig. 3. MEMS widths prediction flowchart based on HOG-SVR

Fig. 4. HOG feature extraction

Fig. 5. Schematic diagram of SVR

Fig. 6. Processes of dataset acquirement

Fig. 7. Prediction results of MEMS groove with different widths and depths based on SVR

Fig. 8. Evaluation indicators of prediction performance of the model

Fig. 9. Prediction results of single point repeatability of the mode