Acta Optica Sinica, Volume. 42, Issue 1, 0116001(2022)
In-situ Photoelectron Spectroscopy of InGaAs Photocathode in Preparation Process
Figures & Tables(10)
Fig. 1. XPS spectra of C1s and O1s at different heated temperatures. (a) C1s; (b) O1s
Fig. 2. XPS fitted spectra of Ga2p3 at different heating temperatures. (a) Sample a; (b) sample b; (c) sample c; (d) sample d; (e) sample e; (f) sample f
Fig. 3. XPS fitted spectra of As2p3 at different heating temperatures. (a) Sample a; (b) sample b; (c) sample c; (d) sample d; (e) sample e; (f) sample f
Fig. 4. XPS fitted spectra of In3d5 at different heating temperatures. (a) Sample a; (b) sample b; (c) sample c; (d) sample d; (e) sample e; (f) sample f
Fig. 5. UPS spectra and change trend of work function at different heating temperatures
Fig. 6. XPS spectra of C1s and O1s after different experimental steps. (a) C1s; (b) O1s
Fig. 7. XPS spectra of Ga2p3, As2p3, and In3d5 after different experimental steps. (a) Ga2p3; (b) As2p3; (c) In3d5
Fig. 8. UPS spectra and change trend of work function value after different experimental steps
Table 1. XPS fitted peak ratios of surface elements for samples after chemical cleaning and heat cleaning%
View tableTable 1. XPS fitted peak ratios of surface elements for samples after chemical cleaning and heat cleaning%
Sample C1s O1s Ga-InAs Ga2O3 As-InGa As As2O3 In-GaAs In2O3 Cleaned sample (25 ℃) 15.91 8.78 26.17 1.41 21.09 18.85 0.28 7.20 0.31 Sample a (500 ℃) 1.81 6.89 44.95 1.32 32.74 2.93 0 9.09 0.27 Sample b (525 ℃) 1.02 5.80 46.16 1.20 34.03 2.17 0 9.40 0.22 Sample c (550 ℃) 0 3.80 47.86 0.90 35.41 1.92 0 9.94 0.17 Sample d (575 ℃) 0 1.60 48.57 0.72 37.37 1.11 0 10.52 0.11 Sample e (600 ℃) 0 0.28 49.45 0.18 38.14 0.53 0 11.42 0 Sample f (625 ℃) 0 0 51.97 0 39.60 0 0 8.43 0
Table 2. Fitting peak ratio of surface elements of samples after different experimental steps%
View tableTable 2. Fitting peak ratio of surface elements of samples after different experimental steps%
Step C1s O1s Ga2p3 As2p3 In3d5 Cs3d Chemical cleaning 13.86 11.59 25.83 41.39 7.33 0 Heat cleaning 0 0 49.79 41.80 8.41 0 Cs activation 0 0 45.73 35.46 6.56 12.25 Cs/O activation 0 20.47 32.76 16.65 6.01 24.11
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Shan Li, Yijun Zhang, Minmin Rong, Shiman Li, Feng Shi, Gangcheng Jiao, Ziheng Wang, Yunsheng Qian. In-situ Photoelectron Spectroscopy of InGaAs Photocathode in Preparation Process[J]. Acta Optica Sinica, 2022, 42(1): 0116001
Paper Information
Category: Materials
Received: May. 31, 2021
Accepted: Jul. 13, 2021
Published Online: Dec. 22, 2021
The Author Email: Zhang Yijun (zhangyijun423@126.com)
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