Spectral Characteristics of Si Quantum Dots Embedded in SiN<sub>x</sub> Thin Films Prepared by Magnetron Co-Sputtering

CHEN Xiao-bo; YANG Wen; DUAN Liang-fei; ZHANG Li-yuan; YANG Pei-zhi; SONG Zhao-ning

doi:10.3964/j.issn.1000-0593(2015)07-1770-04

Spectroscopy and Spectral Analysis, Volume. 35, Issue 7, 1770(2015)

Spectral Characteristics of Si Quantum Dots Embedded in SiN_x Thin Films Prepared by Magnetron Co-Sputtering

CHEN Xiao-bo^1,2、*, YANG Wen¹, DUAN Liang-fei¹, ZHANG Li-yuan¹, YANG Pei-zhi¹, and SONG Zhao-ning³

Author Affiliations

¹[in Chinese]

²[in Chinese]

³Department of Physics and Astronomy,University of Toledo,Toledo,OH 43606,USA

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CHEN Xiao-bo, YANG Wen, DUAN Liang-fei, ZHANG Li-yuan, YANG Pei-zhi, SONG Zhao-ning. Spectral Characteristics of Si Quantum Dots Embedded in SiN_x Thin Films Prepared by Magnetron Co-Sputtering[J]. Spectroscopy and Spectral Analysis, 2015, 35(7): 1770

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Paper Information

Received: Apr. 3, 2014

Accepted: --

Published Online: Sep. 8, 2015

The Author Email: Xiao-bo CHEN (chenxbok@126.com)

DOI:10.3964/j.issn.1000-0593(2015)07-1770-04

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