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Spectroscopy and Spectral Analysis, Volume. 35, Issue 7, 1770(2015)

Spectral Characteristics of Si Quantum Dots Embedded in SiNx Thin Films Prepared by Magnetron Co-Sputtering

CHEN Xiao-bo1,2、*, YANG Wen1, DUAN Liang-fei1, ZHANG Li-yuan1, YANG Pei-zhi1, and SONG Zhao-ning3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3Department of Physics and Astronomy,University of Toledo,Toledo,OH 43606,USA
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    CHEN Xiao-bo, YANG Wen, DUAN Liang-fei, ZHANG Li-yuan, YANG Pei-zhi, SONG Zhao-ning. Spectral Characteristics of Si Quantum Dots Embedded in SiNx Thin Films Prepared by Magnetron Co-Sputtering[J]. Spectroscopy and Spectral Analysis, 2015, 35(7): 1770

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    Paper Information

    Received: Apr. 3, 2014

    Accepted: --

    Published Online: Sep. 8, 2015

    The Author Email: Xiao-bo CHEN (chenxbok@126.com)

    DOI:10.3964/j.issn.1000-0593(2015)07-1770-04

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology