Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 19, Issue 7, 958(1999)

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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References(3)

[1] [1] Mitsui K. In-process sensors for surface roughness and their applications. Precision Engng., 1986, 8(4):212～220

[2] [2] Huang C C. Optical heterodyne profilometer. Optical Engineering, 1984, 23(4):356～370

[4] [4] Kohno T, Ozawa N, Miyamoto K et al.. High precision optical surface sensor. Applied Optics, 1988, 27(1):103～108

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness[J]. Acta Optica Sinica, 1999, 19(7): 958

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Mar. 9, 1998

Accepted: --

Published Online: Aug. 9, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology