Acta Optica Sinica, Volume. 19, Issue 7, 958(1999)
Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness[J]. Acta Optica Sinica, 1999, 19(7): 958