Chinese Journal of Lasers, Volume. 45, Issue 6, 0604001(2018)

High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

Qinyuan Deng1,2, Yan Tang、* *, Yi Zhou1,2, Yong Yang1, and Song Hu1
Author Affiliations
  • 1 State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics,Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2 University of Chinese Academy of Sciences, Beijing 100049, China
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    Qinyuan Deng, Yan Tang, Yi Zhou, Yong Yang, Song Hu. High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry[J]. Chinese Journal of Lasers, 2018, 45(6): 0604001

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    Paper Information

    Category: measurement and metrology

    Received: Nov. 22, 2017

    Accepted: --

    Published Online: Jul. 5, 2018

    The Author Email: Tang Yan (ty0513@163.com)

    DOI:10.3788/CJL201845.0604001

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