Chinese Journal of Lasers, Volume. 45, Issue 6, 0604001(2018)
High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry
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Qinyuan Deng, Yan Tang, Yi Zhou, Yong Yang, Song Hu. High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry[J]. Chinese Journal of Lasers, 2018, 45(6): 0604001
Category: measurement and metrology
Received: Nov. 22, 2017
Accepted: --
Published Online: Jul. 5, 2018
The Author Email: Tang Yan (ty0513@163.com)