High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

Qinyuan Deng; Yan Tang; Yi Zhou; Yong Yang; Song Hu

doi:10.3788/CJL201845.0604001

Chinese Journal of Lasers, Volume. 45, Issue 6, 0604001(2018)

High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry

Qinyuan Deng^1,2, Yan Tang^{、* *}, Yi Zhou^1,2, Yong Yang¹, and Song Hu¹

¹ State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics,Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

² University of Chinese Academy of Sciences, Beijing 100049, China

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Qinyuan Deng, Yan Tang, Yi Zhou, Yong Yang, Song Hu. High-Resolution Surface Topography Measurement Based on Frequency-Domain Analysis in White Light Interferometry[J]. Chinese Journal of Lasers, 2018, 45(6): 0604001

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Paper Information

Category: measurement and metrology

Received: Nov. 22, 2017

Accepted: --

Published Online: Jul. 5, 2018

The Author Email: Tang Yan (ty0513@163.com)

DOI:10.3788/CJL201845.0604001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology