Acta Optica Sinica, Volume. 39, Issue 10, 1012001(2019)

Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry

Mengqi Han and Wenjing Chen*
Author Affiliations
  • Department of Optoelectronic Science and Technology, College of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610064, China
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    Figures & Tables(18)
    Schematic of measurement geometry
    Curve-fitting processing. (a) One line of fringes; (b) upper and lower envelopes of fringes obtained by extreme points; (c) background-eliminated fringes
    Piecewise-mean processing. (a) One line of piecewise fringes; (b) fringes after piecewise fitting; (c) background-eliminated fringes
    Simulated object and fringes. (a) Deformed fringes; (b) simulated object
    Reconstructed object by global-mean processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
    Reconstructed object by curve-fitting processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
    Reconstructed object by piecewise-mean processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
    Reconstructed object by one-adjusting-factor processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
    Reconstructed object by two-adjusting-factor processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
    Reconstructed object with uncorrected phase and reconstruction error. (a) Reconstructed object; (b) reconstruction error
    Reconstructed object with second-order corrected phase and reconstruction error. (a) Reconstructed object; (b) reconstruction error
    Experiment. (a) Reference fringes; (b) deformed fringes
    Reconstructions by multiple methods. (a) Reconstruction by Fourier transform; (b) reconstruction by global mean; (c) reconstruction by curve fitting; (d) reconstruction by piecewise mean; (e) reconstruction by one adjusting factor; (f) reconstruction by two adjusting factors
    Errors of reconstructions by multiple methods. (a) Reconstruction error by Fourier transform; (b) reconstruction error by global mean; (c) reconstruction error by curve fitting; (d) reconstruction error by piecewise mean; (e) reconstruction error by one adjusting factor; (f) reconstruction error by two adjusting factors
    Detailed comparisons. (a) Line 220 reconstructed surface; (b) magnification of local detail
    • Table 1. Comparison of results by several methods

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      Table 1. Comparison of results by several methods

      MethodMaximum error /mmMean of error /mmStandard deviation /mmTime /s
      Fourier transform7.361400.1781900.4951607.503960
      Global mean0.754950.1069400.17578014.120838
      Curve-fitting0.566570.0725190.13066025.083935
      Piecewise mean0.405490.0555820.09819620.676546
      One factor0.527370.0735180.12715012.993006
      Two factors0.367690.0411620.07761210.702224
    • Table 2. Comparison of results before and after second-order phase correction

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      Table 2. Comparison of results before and after second-order phase correction

      ParameterSecond-order modifiedUnmodified
      Maximum error /mm0.5123700.799370
      Mean of error /mm0.0542010.094652
      Standard deviation /mm0.0968530.157670
      Time /s10.3439652.912564
    • Table 3. Standard deviation between multiple methods and PMP

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      Table 3. Standard deviation between multiple methods and PMP

      MethodFourier transformGlobal meanCurve-fittingPiecewise meanOne factorTwo factors
      Standard deviation /mm2.68770.46280.29840.27740.30470.2745
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    Mengqi Han, Wenjing Chen. Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry[J]. Acta Optica Sinica, 2019, 39(10): 1012001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 26, 2019

    Accepted: Jun. 10, 2019

    Published Online: Oct. 9, 2019

    The Author Email: Chen Wenjing (chenwj0409@scu.edu.cn)

    DOI:10.3788/AOS201939.1012001

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