Acta Optica Sinica, Volume. 39, Issue 10, 1012001(2019)
Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry
Fig. 2. Curve-fitting processing. (a) One line of fringes; (b) upper and lower envelopes of fringes obtained by extreme points; (c) background-eliminated fringes
Fig. 3. Piecewise-mean processing. (a) One line of piecewise fringes; (b) fringes after piecewise fitting; (c) background-eliminated fringes
Fig. 5. Reconstructed object by global-mean processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
Fig. 6. Reconstructed object by curve-fitting processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
Fig. 7. Reconstructed object by piecewise-mean processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
Fig. 8. Reconstructed object by one-adjusting-factor processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
Fig. 9. Reconstructed object by two-adjusting-factor processing and reconstruction error. (a) Reconstructed object; (b) reconstruction error
Fig. 10. Reconstructed object with uncorrected phase and reconstruction error. (a) Reconstructed object; (b) reconstruction error
Fig. 11. Reconstructed object with second-order corrected phase and reconstruction error. (a) Reconstructed object; (b) reconstruction error
Fig. 13. Reconstructions by multiple methods. (a) Reconstruction by Fourier transform; (b) reconstruction by global mean; (c) reconstruction by curve fitting; (d) reconstruction by piecewise mean; (e) reconstruction by one adjusting factor; (f) reconstruction by two adjusting factors
Fig. 14. Errors of reconstructions by multiple methods. (a) Reconstruction error by Fourier transform; (b) reconstruction error by global mean; (c) reconstruction error by curve fitting; (d) reconstruction error by piecewise mean; (e) reconstruction error by one adjusting factor; (f) reconstruction error by two adjusting factors
Fig. 15. Detailed comparisons. (a) Line 220 reconstructed surface; (b) magnification of local detail
|
|
|
Get Citation
Copy Citation Text
Mengqi Han, Wenjing Chen. Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry[J]. Acta Optica Sinica, 2019, 39(10): 1012001
Category: Instrumentation, Measurement and Metrology
Received: Apr. 26, 2019
Accepted: Jun. 10, 2019
Published Online: Oct. 9, 2019
The Author Email: Chen Wenjing (chenwj0409@scu.edu.cn)