Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry

Mengqi Han; Wenjing Chen

doi:10.3788/AOS201939.1012001

Acta Optica Sinica, Volume. 39, Issue 10, 1012001(2019)

Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry

Mengqi Han and Wenjing Chen^*

Department of Optoelectronic Science and Technology, College of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610064, China

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Mengqi Han, Wenjing Chen. Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry[J]. Acta Optica Sinica, 2019, 39(10): 1012001

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Apr. 26, 2019

Accepted: Jun. 10, 2019

Published Online: Oct. 9, 2019

The Author Email: Chen Wenjing (chenwj0409@scu.edu.cn)

DOI:10.3788/AOS201939.1012001

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