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Journal of Synthetic Crystals, Volume. 53, Issue 5, 773(2024)

Molten KOH Etching Behaviors of Heavily Doped P-Type SiC

CHENG Jiahui1, YANG Lei1, WANG Jinnan2, GONG Chunsheng2、*, ZHANG Zesheng2, and JIAN Jikang1
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    CHENG Jiahui, YANG Lei, WANG Jinnan, GONG Chunsheng, ZHANG Zesheng, JIAN Jikang. Molten KOH Etching Behaviors of Heavily Doped P-Type SiC[J]. Journal of Synthetic Crystals, 2024, 53(5): 773

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    Received: Dec. 12, 2023

    Accepted: --

    Published Online: Aug. 22, 2024

    The Author Email: GONG Chunsheng (645385331@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology