Acta Optica Sinica, Volume. 31, Issue 11, 1112010(2011)

Analysis of Focus Dislocation Induced by the Microlens Array Measuring Based on Grating Diffraction

Zhu Xianchang*, Wu Fan, Cao Xuedong, Wu Shibin, and Zhang Peng
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    References(23)

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    Zhu Xianchang, Wu Fan, Cao Xuedong, Wu Shibin, Zhang Peng. Analysis of Focus Dislocation Induced by the Microlens Array Measuring Based on Grating Diffraction[J]. Acta Optica Sinica, 2011, 31(11): 1112010

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 18, 2011

    Accepted: --

    Published Online: Oct. 21, 2011

    The Author Email: Xianchang Zhu (zhuxianchang@126.com)

    DOI:10.3788/aos201131.1112010

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