Acta Optica Sinica, Volume. 31, Issue 11, 1112010(2011)
Analysis of Focus Dislocation Induced by the Microlens Array Measuring Based on Grating Diffraction
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Zhu Xianchang, Wu Fan, Cao Xuedong, Wu Shibin, Zhang Peng. Analysis of Focus Dislocation Induced by the Microlens Array Measuring Based on Grating Diffraction[J]. Acta Optica Sinica, 2011, 31(11): 1112010
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jun. 18, 2011
Accepted: --
Published Online: Oct. 21, 2011
The Author Email: Xianchang Zhu (zhuxianchang@126.com)
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