Surface Roughness Optimization of 3D Structures Based on Peripheral Photoinhibition and Chemical Quenching Method (Invited)

Xiujun Gao; Chenliang Ding; Xiaoming Shen; Gangyao Zhan; Dazhao Zhu; Cuifang Kuang; Xu Liu

doi:10.3788/CJL240560

Chinese Journal of Lasers, Volume. 51, Issue 12, 1202417(2024)

Surface Roughness Optimization of 3D Structures Based on Peripheral Photoinhibition and Chemical Quenching Method (Invited)

Xiujun Gao¹, Chenliang Ding^1、*, Xiaoming Shen¹, Gangyao Zhan¹, Dazhao Zhu¹, Cuifang Kuang^1,2,3, and Xu Liu^1,2,3

Author Affiliations

¹Research Center for Intelligent Chips and Devices, Zhejiang Lab , Hangzhou 311121, Zhejiang , China

²State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China

³ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou 311200, Zhejiang , China

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References(29)

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Xiujun Gao, Chenliang Ding, Xiaoming Shen, Gangyao Zhan, Dazhao Zhu, Cuifang Kuang, Xu Liu. Surface Roughness Optimization of 3D Structures Based on Peripheral Photoinhibition and Chemical Quenching Method (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202417

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Jan. 31, 2024

Accepted: Apr. 1, 2024

Published Online: Jun. 3, 2024

The Author Email: Ding Chenliang (dingcl@zhejianglab.com)

DOI:10.3788/CJL240560

CSTR:32183.14.CJL240560

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology