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Acta Optica Sinica, Volume. 39, Issue 7, 0712005(2019)

Method for Surface Quality Inspection Based on Total Scattering Measurement

Cong Huang1, Kepeng Zhang2, Xiang Wang1, Nianchun Sun1, Bin Zhang1、*, Jian Chen3, and Jianhua Zhao3
Author Affiliations
  • 1 College of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610065, China
  • 2 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3 Anhui Province Key Laboratory of Non-Destructive Evaluation, ZC Optoelectronic Technologies. LTD., Hefei, Anhui 230031, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
    Equations (0)
    References (15)
    Cited By (7)
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    Figures & Tables(9)
    Two contributions to scattering from dig or scratch

    Fig. 1. Two contributions to scattering from dig or scratch

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    Particle distribution and ARS with different surface cleanliness. (a) Particle distribution; (b) ARS

    Fig. 2. Particle distribution and ARS with different surface cleanliness. (a) Particle distribution; (b) ARS

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    ARS of defect. (a) Different defect types; (b) different defect numbers

    Fig. 3. ARS of defect. (a) Different defect types; (b) different defect numbers

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    ARS and TS with different defect grade numbers. (a) ARS; (b) TS

    Fig. 4. ARS and TS with different defect grade numbers. (a) ARS; (b) TS

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    Defect images. (a) No. 1 component; (b) No. 2 component; (c) No. 3 component; (d) No. 4 component; (e) No. 5 component; (f) No. 6 component

    Fig. 5. Defect images. (a) No. 1 component; (b) No. 2 component; (c) No. 3 component; (d) No. 4 component; (e) No. 5 component; (f) No. 6 component

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    Comparison between experimental result and theoretical calculation result

    Fig. 6. Comparison between experimental result and theoretical calculation result

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    • Table 1. TS with different defect types

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      Table 1. TS with different defect types

      Defect typeDigScratch 1Scratch 2Scratch 3
      TS /10-67.705.996.236.63

    • Table 2. TS with different defect numbers

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      Table 2. TS with different defect numbers

      Defect numberB1B2B3B4
      TS /10-66.236.226.156.25

    • Table 3. Judgment of surface defect tolerance under different Gm

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      Table 3. Judgment of surface defect tolerance under different Gm

      Gm /mm0.250.160.100.063
      SDT /mm3×0.257×0.1618×0.1048×0.063
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    Cong Huang, Kepeng Zhang, Xiang Wang, Nianchun Sun, Bin Zhang, Jian Chen, Jianhua Zhao. Method for Surface Quality Inspection Based on Total Scattering Measurement[J]. Acta Optica Sinica, 2019, 39(7): 0712005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 14, 2019

    Accepted: Mar. 25, 2019

    Published Online: Jul. 16, 2019

    The Author Email: Zhang Bin (zhangbinff@sohu.com)

    DOI:10.3788/AOS201939.0712005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology